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Design and fabrication of a novel thermally actuated vertical bimorph scanner for an integrated AFM

Design and fabrication of a novel thermally actuated vertical bimorph scanner for an integrated AFM
Design and fabrication of a novel thermally actuated vertical bimorph scanner for an integrated AFM
This paper presents the concept and design of a new lateral scanning system for an integrated atomic force microscope (AFM). The core part of the scanner is formed by vertical bimorph beams, which are reported for the first time in this paper. They consist of silicon beams side-coated with aluminium, which bend upon heating causing movement in the horizontal plane. Combining vertical bimorphs with planar bimorphs allows three-dimensional actuation. Theoretical analyses comprising electro-thermal and thermo-elastic calculations show that large actuation movements are possible at low electrical input power and low input voltage. A process has been developed to deposit aluminium onto sidewalls of silicon beams. Furthermore, the fabrication process for the actuator is described.
4019
389-397
SPIE
Sehr, H.
49a567aa-b765-4dfa-bb18-4aa5fb3ea7f9
Evans, A.G.R.
c4a3f208-8fd9-491d-870f-ce7eef943311
Brunnschweiler, A.
2d39ef7c-b95e-476c-b435-316b6618a565
Ensell, G.J.
05e24f49-3922-4e5f-9aee-1e6078650579
Sehr, H.
49a567aa-b765-4dfa-bb18-4aa5fb3ea7f9
Evans, A.G.R.
c4a3f208-8fd9-491d-870f-ce7eef943311
Brunnschweiler, A.
2d39ef7c-b95e-476c-b435-316b6618a565
Ensell, G.J.
05e24f49-3922-4e5f-9aee-1e6078650579

Sehr, H., Evans, A.G.R., Brunnschweiler, A. and Ensell, G.J. (2000) Design and fabrication of a novel thermally actuated vertical bimorph scanner for an integrated AFM. In Design, Test, Integration, and Packaging of MEMS/MOEMS. vol. 4019, SPIE. pp. 389-397 . (doi:10.1117/12.382279).

Record type: Conference or Workshop Item (Paper)

Abstract

This paper presents the concept and design of a new lateral scanning system for an integrated atomic force microscope (AFM). The core part of the scanner is formed by vertical bimorph beams, which are reported for the first time in this paper. They consist of silicon beams side-coated with aluminium, which bend upon heating causing movement in the horizontal plane. Combining vertical bimorphs with planar bimorphs allows three-dimensional actuation. Theoretical analyses comprising electro-thermal and thermo-elastic calculations show that large actuation movements are possible at low electrical input power and low input voltage. A process has been developed to deposit aluminium onto sidewalls of silicon beams. Furthermore, the fabrication process for the actuator is described.

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More information

Published date: 10 April 2000
Venue - Dates: Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, 2000, , Paris, France, 2000-05-09 - 2000-05-11
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 252840
URI: http://eprints.soton.ac.uk/id/eprint/252840
PURE UUID: 72fe087c-4aeb-4237-a5cf-1c2d49a22d0c

Catalogue record

Date deposited: 05 Jul 2001
Last modified: 15 Mar 2024 23:36

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Contributors

Author: H. Sehr
Author: A.G.R. Evans
Author: A. Brunnschweiler
Author: G.J. Ensell

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