Tenbroek, B M, Whiting, G, Lee, M S L, Edwards, C F, Redman-White, W, Uren, M J and Bunyan, R J T (1997) Experimental investigations of thermal conductivity of buried oxides in SIMOX and BESOI wafers.
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Published date: September 1997
Additional Information:
Organisation: Proc Electrochemical Society Meeting, Paris, France
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 252998
URI: http://eprints.soton.ac.uk/id/eprint/252998
PURE UUID: 10664acf-5027-472a-85a1-37ff703494ee
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Date deposited: 19 Apr 2000
Last modified: 10 Dec 2021 20:31
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Contributors
Author:
B M Tenbroek
Author:
G Whiting
Author:
M S L Lee
Author:
C F Edwards
Author:
W Redman-White
Author:
M J Uren
Author:
R J T Bunyan
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