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A Monolithic surface micromachined Z-axis gyroscope with digital output

A Monolithic surface micromachined Z-axis gyroscope with digital output
A Monolithic surface micromachined Z-axis gyroscope with digital output
16-19
Xuesong, J
b1647500-ce41-479b-b7cf-f5303bfb4231
Seeger, J I
b9c6eb4e-fbff-40ce-bbdf-1f1ec421ec4d
Kraft, M
54927621-738f-4d40-af56-a027f686b59f
Boser, B E
d52efa31-8744-4779-99b9-c8bfaf5b538b
Xuesong, J
b1647500-ce41-479b-b7cf-f5303bfb4231
Seeger, J I
b9c6eb4e-fbff-40ce-bbdf-1f1ec421ec4d
Kraft, M
54927621-738f-4d40-af56-a027f686b59f
Boser, B E
d52efa31-8744-4779-99b9-c8bfaf5b538b

Xuesong, J, Seeger, J I, Kraft, M and Boser, B E (2000) A Monolithic surface micromachined Z-axis gyroscope with digital output. In Proceedings Symposium on VLSI Circuits. pp. 16-19 .

Record type: Conference or Workshop Item (Paper)

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More information

Published date: June 2000
Venue - Dates: Proceedings Symposium on VLSI Circuits, 2000-05-31
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 255784
URI: http://eprints.soton.ac.uk/id/eprint/255784
PURE UUID: f7866a4d-8549-46fc-8d29-49ded6099dbc

Catalogue record

Date deposited: 20 Jun 2001
Last modified: 08 Jan 2022 16:25

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Contributors

Author: J Xuesong
Author: J I Seeger
Author: M Kraft
Author: B E Boser

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