Mokhtari, M., Kraft, Michael, Alavi, F. and King, D. (2002) Analysis of parasite effects in the performance of closed loop micromachined inertial sensors with higher order SD-Modulators. In Proceedings of Micromechanics Europe (MME). pp. 173-176 .
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Conference or Workshop Item
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Published date: 2002
Additional Information:
Event Dates: October 2002
Venue - Dates:
Micromechanics Europe (MME 2002): 13th European Micromechanics Workshop, Sinaia, Sinaia, Romania, 2002-10-06 - 2002-10-08
Organisations:
Nanoelectronics and Nanotechnology
Identifiers
Local EPrints ID: 257812
URI: http://eprints.soton.ac.uk/id/eprint/257812
PURE UUID: 1bb751fb-b9f9-43a3-b052-58ef72c89581
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Date deposited: 26 Jun 2003
Last modified: 05 Mar 2024 18:25
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Contributors
Author:
M. Mokhtari
Author:
Michael Kraft
Author:
F. Alavi
Author:
D. King
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