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An integrated surface micromachined capacitive lateral accelerometer with 2 uG/rt-Hz resolution.

An integrated surface micromachined capacitive lateral accelerometer with 2 uG/rt-Hz resolution.
An integrated surface micromachined capacitive lateral accelerometer with 2 uG/rt-Hz resolution.
202-205
Jiang, X
69bfa956-bad2-4c93-b007-7c2392ffbbdc
Wang, F
8fed15b6-1e45-4b00-b41a-af5e17694b15
Kraft, Michael
c2ff2439-b909-4af3-824d-9d7c0d14dc3e
Boser, B E
d52efa31-8744-4779-99b9-c8bfaf5b538b
Jiang, X
69bfa956-bad2-4c93-b007-7c2392ffbbdc
Wang, F
8fed15b6-1e45-4b00-b41a-af5e17694b15
Kraft, Michael
c2ff2439-b909-4af3-824d-9d7c0d14dc3e
Boser, B E
d52efa31-8744-4779-99b9-c8bfaf5b538b

Jiang, X, Wang, F, Kraft, Michael and Boser, B E (2002) An integrated surface micromachined capacitive lateral accelerometer with 2 uG/rt-Hz resolution. Digest of Solid State Sensor and Actuator Workshop, Hilton Head Island of America, United States. pp. 202-205 .

Record type: Conference or Workshop Item (Other)

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More information

Published date: 2002
Additional Information: Event Dates: June 2002
Venue - Dates: Digest of Solid State Sensor and Actuator Workshop, Hilton Head Island of America, United States, 2002-05-31
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 257815
URI: http://eprints.soton.ac.uk/id/eprint/257815
PURE UUID: 893839c4-23b3-46ee-9d6f-99bcb56ca224

Catalogue record

Date deposited: 26 Jun 2003
Last modified: 08 Jan 2022 02:40

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Contributors

Author: X Jiang
Author: F Wang
Author: Michael Kraft
Author: B E Boser

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