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Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor

Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor
Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor
This paper reports on the measurements of displacement and blocking force of piezoelectric micro-cantilevers. The free displacement was studied using a surface profiler and a laser vibrometer. The experimental data were compared with an analytical model which showed that the PZT thin film has a Young's modulus of 110 GPa and a piezoelectric coefficient d31,f of 30 pC/N. The blocking force was investigated by means of a micro-machined silicon force sensor based on the silicon piezoresistive effect. The generated force was detected by measuring a change in voltage within a piezoresistors bridge. The sensor was calibrated using a commercial nano-indenter as a force and displacement standard. Application of the method showed that a 700 µm long micro-cantilever showed a maximum displacement of 800 nm and a blocking force of 0.1 mN at an actuation voltage of 5 V, within experimental error of the theoretical predictions based on the known piezoelectric and elastic properties of the PZT film.
MEMS, FABRICATION, CANTILEVER
0924-4247
35-44
Duval, Fabrice
cb7a6ecf-d235-4e57-afac-8a93d5f059bb
Wilson, Stephen
92d01e67-bd6e-49a5-8f48-19932badb48e
Ensell, Graham
dd522300-e6ad-4f1d-8172-b27dd007770f
Evanno, Nicolas
b1c5c220-9973-42f9-9014-6f2e4b7d4057
Cain, Markys
753d62e0-7174-4c38-bdd8-5dc687f3e048
Whatmore, Roger
4249edbd-0bd9-4ac7-8896-5cb27ce29f93
Duval, Fabrice
cb7a6ecf-d235-4e57-afac-8a93d5f059bb
Wilson, Stephen
92d01e67-bd6e-49a5-8f48-19932badb48e
Ensell, Graham
dd522300-e6ad-4f1d-8172-b27dd007770f
Evanno, Nicolas
b1c5c220-9973-42f9-9014-6f2e4b7d4057
Cain, Markys
753d62e0-7174-4c38-bdd8-5dc687f3e048
Whatmore, Roger
4249edbd-0bd9-4ac7-8896-5cb27ce29f93

Duval, Fabrice, Wilson, Stephen, Ensell, Graham, Evanno, Nicolas, Cain, Markys and Whatmore, Roger (2007) Characterisation of PZT thin film micro-actuators using a silicon micro-force sensor. Sensors and Actuators A: Physical, 133 (1), 35-44. (doi:10.1016/j.sna.2006.03.035).

Record type: Article

Abstract

This paper reports on the measurements of displacement and blocking force of piezoelectric micro-cantilevers. The free displacement was studied using a surface profiler and a laser vibrometer. The experimental data were compared with an analytical model which showed that the PZT thin film has a Young's modulus of 110 GPa and a piezoelectric coefficient d31,f of 30 pC/N. The blocking force was investigated by means of a micro-machined silicon force sensor based on the silicon piezoresistive effect. The generated force was detected by measuring a change in voltage within a piezoresistors bridge. The sensor was calibrated using a commercial nano-indenter as a force and displacement standard. Application of the method showed that a 700 µm long micro-cantilever showed a maximum displacement of 800 nm and a blocking force of 0.1 mN at an actuation voltage of 5 V, within experimental error of the theoretical predictions based on the known piezoelectric and elastic properties of the PZT film.

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Published date: January 2007
Keywords: MEMS, FABRICATION, CANTILEVER
Organisations: Nanoelectronics and Nanotechnology

Identifiers

Local EPrints ID: 263266
URI: http://eprints.soton.ac.uk/id/eprint/263266
ISSN: 0924-4247
PURE UUID: 1ab8175b-d3c2-4a73-b508-68aee0248549

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Date deposited: 23 Feb 2007
Last modified: 14 Mar 2024 07:28

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Contributors

Author: Fabrice Duval
Author: Stephen Wilson
Author: Graham Ensell
Author: Nicolas Evanno
Author: Markys Cain
Author: Roger Whatmore

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