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Development of nanostructures for thermoelectric microgenerators using ion-track lithography

Development of nanostructures for thermoelectric microgenerators using ion-track lithography
Development of nanostructures for thermoelectric microgenerators using ion-track lithography
A novel fabrication process for nanostructures for thermoelectric microgenerators, based on a combination of a traditional silicon microfabrication techniques, electroplating and submicron ion-track nanolithography, is discussed. Ion-track etched polyimide nanotemplates (30–80 nm pore diameters) are used to grow Bi2Te3 nanowires by electroplating.The Bi2Te3 film’s microstructural and thermoelectric propertiesare reported.
0013-5194
500-501
Koukharenko, E.
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Li, X.
ea8135d4-1bd7-4771-85cd-eb8f2a264654
Nandhakumar, I.S.
e9850fe5-1152-4df8-8a26-ed44b5564b04
Schiedt, B.
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Trautmann, C.
4e4acd66-8a0f-41e2-8fdf-d30baba7b412
Speed, J.
c71e1c12-fb59-45e5-bb4c-51a7a4584dba
Tudor, M.J.
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Beeby, S.P.
ba565001-2812-4300-89f1-fe5a437ecb0d
White, N.M.
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Koukharenko, E.
b34ae878-2776-4088-8880-5b2bd4f33ec3
Li, X.
ea8135d4-1bd7-4771-85cd-eb8f2a264654
Nandhakumar, I.S.
e9850fe5-1152-4df8-8a26-ed44b5564b04
Schiedt, B.
97b02cd8-6c8d-41af-bb35-0e0c020315f5
Trautmann, C.
4e4acd66-8a0f-41e2-8fdf-d30baba7b412
Speed, J.
c71e1c12-fb59-45e5-bb4c-51a7a4584dba
Tudor, M.J.
46eea408-2246-4aa0-8b44-86169ed601ff
Beeby, S.P.
ba565001-2812-4300-89f1-fe5a437ecb0d
White, N.M.
c7be4c26-e419-4e5c-9420-09fc02e2ac9c

Koukharenko, E., Li, X., Nandhakumar, I.S., Schiedt, B., Trautmann, C., Speed, J., Tudor, M.J., Beeby, S.P. and White, N.M. (2008) Development of nanostructures for thermoelectric microgenerators using ion-track lithography. Electronics Letters, 44 (7), 500-501. (doi:10.1049/el:20080111).

Record type: Article

Abstract

A novel fabrication process for nanostructures for thermoelectric microgenerators, based on a combination of a traditional silicon microfabrication techniques, electroplating and submicron ion-track nanolithography, is discussed. Ion-track etched polyimide nanotemplates (30–80 nm pore diameters) are used to grow Bi2Te3 nanowires by electroplating.The Bi2Te3 film’s microstructural and thermoelectric propertiesare reported.

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Published date: 27 March 2008
Additional Information: Imported from ISI Web of Science
Organisations: EEE

Identifiers

Local EPrints ID: 268957
URI: http://eprints.soton.ac.uk/id/eprint/268957
ISSN: 0013-5194
PURE UUID: 7471d59c-e885-4248-b21d-ed896c2efe75
ORCID for I.S. Nandhakumar: ORCID iD orcid.org/0000-0002-9668-9126
ORCID for M.J. Tudor: ORCID iD orcid.org/0000-0003-1179-9455
ORCID for S.P. Beeby: ORCID iD orcid.org/0000-0002-0800-1759
ORCID for N.M. White: ORCID iD orcid.org/0000-0003-1532-6452

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Date deposited: 21 Apr 2010 07:46
Last modified: 15 Mar 2024 02:57

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Contributors

Author: E. Koukharenko
Author: X. Li
Author: B. Schiedt
Author: C. Trautmann
Author: J. Speed
Author: M.J. Tudor ORCID iD
Author: S.P. Beeby ORCID iD
Author: N.M. White ORCID iD

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