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Silicon-based photonic crystal structures

Silicon-based photonic crystal structures
Silicon-based photonic crystal structures
It is likely that the commercialisation of Photonic Crystal (PC) technology will require the high-volume capabilities provided by semiconductor nanofabrication processes. To this end, a Silicon-compatible PC waveguide could form the basic building block of an all-optical circuit. This presentation will discuss the development of PC research at Southampton University (UK) which began with deep photoelectrochemically etched holes in single-crystal Silicon. This initial work progressed to an all dielectric waveguide structure on a Silicon substrate, with the materials utilised being compatible with a CMOS process. PC nanofabrication and optical characterisation using these waveguiding structures will be described in detail.
Parker, G.J.
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Charlton, M.D.B.
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Zoorob, M.E.
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Baumberg, J.J.
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Netti, M.C.
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Cox, S.J.
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Wilkinson, J.S.
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Parker, G.J.
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Charlton, M.D.B.
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Zoorob, M.E.
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Baumberg, J.J.
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Netti, M.C.
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Cox, S.J.
feea307f-f0e1-4063-869b-a3d0d947bfe2
Wilkinson, J.S.
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Parker, G.J., Charlton, M.D.B., Zoorob, M.E., Baumberg, J.J., Netti, M.C., Cox, S.J. and Wilkinson, J.S. (2001) Silicon-based photonic crystal structures. The Knowledge Foundation International Conference on Photonic Nanostructures, San Diego, USA. 11 - 12 Oct 2001.

Record type: Conference or Workshop Item (Paper)

Abstract

It is likely that the commercialisation of Photonic Crystal (PC) technology will require the high-volume capabilities provided by semiconductor nanofabrication processes. To this end, a Silicon-compatible PC waveguide could form the basic building block of an all-optical circuit. This presentation will discuss the development of PC research at Southampton University (UK) which began with deep photoelectrochemically etched holes in single-crystal Silicon. This initial work progressed to an all dielectric waveguide structure on a Silicon substrate, with the materials utilised being compatible with a CMOS process. PC nanofabrication and optical characterisation using these waveguiding structures will be described in detail.

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Published date: 2001
Venue - Dates: The Knowledge Foundation International Conference on Photonic Nanostructures, San Diego, USA, 2001-10-11 - 2001-10-12

Identifiers

Local EPrints ID: 63349
URI: http://eprints.soton.ac.uk/id/eprint/63349
PURE UUID: c54e16b1-c5bc-4954-b4e5-606ba4c818a9
ORCID for J.S. Wilkinson: ORCID iD orcid.org/0000-0003-4712-1697

Catalogue record

Date deposited: 21 Oct 2008
Last modified: 14 Mar 2024 02:32

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Contributors

Author: G.J. Parker
Author: M.D.B. Charlton
Author: M.E. Zoorob
Author: J.J. Baumberg
Author: M.C. Netti
Author: S.J. Cox
Author: J.S. Wilkinson ORCID iD

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