A reassessment of materials issues in microelectromechanical systems (MEMS)
A reassessment of materials issues in microelectromechanical systems (MEMS)
Over the past 7 years there has been an explosion of research activity into materials for MicroElectroMechanical Systems (MEMS). This paper reviews the current issues associated
with materials for MEMS. Five topical areas are addressed: the effect of lengthscale, the selection of materials and processes, the MEMS material set, microfabrication processes and material characterization. Each of these areas is examined, with particular emphasis on the potential impact of materials solutions. The paper concludes with an assessment of the
progress in MEMS materials made since 2000.
mems, materials, review
363-385
Jiang, Liudi
374f2414-51f0-418f-a316-e7db0d6dc4d1
Spearing, S. Mark
9e56a7b3-e0e8-47b1-a6b4-db676ed3c17a
July 2007
Jiang, Liudi
374f2414-51f0-418f-a316-e7db0d6dc4d1
Spearing, S. Mark
9e56a7b3-e0e8-47b1-a6b4-db676ed3c17a
Jiang, Liudi and Spearing, S. Mark
(2007)
A reassessment of materials issues in microelectromechanical systems (MEMS).
Journal of the Indian Institute of Science, 87 (3), .
Abstract
Over the past 7 years there has been an explosion of research activity into materials for MicroElectroMechanical Systems (MEMS). This paper reviews the current issues associated
with materials for MEMS. Five topical areas are addressed: the effect of lengthscale, the selection of materials and processes, the MEMS material set, microfabrication processes and material characterization. Each of these areas is examined, with particular emphasis on the potential impact of materials solutions. The paper concludes with an assessment of the
progress in MEMS materials made since 2000.
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More information
Published date: July 2007
Additional Information:
Invited review.
Keywords:
mems, materials, review
Organisations:
Engineering Mats & Surface Engineerg Gp
Identifiers
Local EPrints ID: 63546
URI: http://eprints.soton.ac.uk/id/eprint/63546
ISSN: 0970-4140
PURE UUID: c3fc88c8-fad6-4a6a-a5b8-75ce23ee0b5c
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Date deposited: 20 Oct 2008
Last modified: 09 Jan 2022 03:20
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