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Homogeneous substrate heating using a CO2 laser with feedback, rastering, and temperature monitoring

Homogeneous substrate heating using a CO2 laser with feedback, rastering, and temperature monitoring
Homogeneous substrate heating using a CO2 laser with feedback, rastering, and temperature monitoring
We report results from a highly versatile and scalable raster-scanned continuous wave CO2 laser heater incorporating a dual wavelength photodiode-based temperature monitoring system with feedback control. The system is able to uniformly heat substrates inside a vacuum chamber, reduce the occurrence of substrate fracture and allow almost negligible heat loss to the deposition chamber and surroundings. The minimum achievable temperature difference across the substrate is, in practice, limited by the fastest achievable raster scan speed.
0034-6748
4223-4225
Barrington, S.J.
bf10bec5-2c40-4470-a0ef-5bcc69282d1a
Eason, R.W.
e38684c3-d18c-41b9-a4aa-def67283b020
Barrington, S.J.
bf10bec5-2c40-4470-a0ef-5bcc69282d1a
Eason, R.W.
e38684c3-d18c-41b9-a4aa-def67283b020

Barrington, S.J. and Eason, R.W. (2000) Homogeneous substrate heating using a CO2 laser with feedback, rastering, and temperature monitoring. Review of Scientific Instruments, 71 (11), 4223-4225. (doi:10.1063/1.1311938).

Record type: Article

Abstract

We report results from a highly versatile and scalable raster-scanned continuous wave CO2 laser heater incorporating a dual wavelength photodiode-based temperature monitoring system with feedback control. The system is able to uniformly heat substrates inside a vacuum chamber, reduce the occurrence of substrate fracture and allow almost negligible heat loss to the deposition chamber and surroundings. The minimum achievable temperature difference across the substrate is, in practice, limited by the fastest achievable raster scan speed.

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Published date: 2000

Identifiers

Local EPrints ID: 13626
URI: https://eprints.soton.ac.uk/id/eprint/13626
ISSN: 0034-6748
PURE UUID: 2247ad76-7c28-4d3f-8e2d-b3a48454cf41
ORCID for R.W. Eason: ORCID iD orcid.org/0000-0001-9704-2204

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Date deposited: 06 Jan 2005
Last modified: 10 Jan 2019 01:39

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