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Fabrication of piezoelectric micro-cantilevers in domain-engineered LiNbO3 single crystals

Fabrication of piezoelectric micro-cantilevers in domain-engineered LiNbO3 single crystals
Fabrication of piezoelectric micro-cantilevers in domain-engineered LiNbO3 single crystals
We report on a novel route for fabrication of micro-cantilevers in ferroelectric single-crystal lithium niobate (LiNbO3). Using the sequential techniques of photolithographic patterning, electric field poling, direct bonding and domain-oriented differential etching, free-standing cantilevers of dimensions 50µm × 50µm × 5 mm in the x, z and y crystallographic directions, respectively, have been fabricated.
0960-1317
53-57
Sones, C.L.
9de9d8ee-d394-46a5-80b7-e341c0eed0a8
Mailis, Sakellaris
233e0768-3f8d-430e-8fdf-92e6f4f6a0c4
Apostolopoulos, V.
8a898740-4c71-4040-a577-9b9d70530b4d
Barry, I.E.
d4c9ca54-8091-495f-81b3-a73c4fea734d
Gawith, C.B.E.
926665c0-84c7-4a1d-ae19-ee6d7d14c43e
Smith, Peter G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Eason, R.W.
e38684c3-d18c-41b9-a4aa-def67283b020
Sones, C.L.
9de9d8ee-d394-46a5-80b7-e341c0eed0a8
Mailis, Sakellaris
233e0768-3f8d-430e-8fdf-92e6f4f6a0c4
Apostolopoulos, V.
8a898740-4c71-4040-a577-9b9d70530b4d
Barry, I.E.
d4c9ca54-8091-495f-81b3-a73c4fea734d
Gawith, C.B.E.
926665c0-84c7-4a1d-ae19-ee6d7d14c43e
Smith, Peter G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Eason, R.W.
e38684c3-d18c-41b9-a4aa-def67283b020

Sones, C.L., Mailis, Sakellaris, Apostolopoulos, V., Barry, I.E., Gawith, C.B.E., Smith, Peter G.R. and Eason, R.W. (2002) Fabrication of piezoelectric micro-cantilevers in domain-engineered LiNbO3 single crystals. Journal of Micromechanics and Microengineering, 12 (1), 53-57. (doi:10.1088/0960-1317/12/1/308).

Record type: Article

Abstract

We report on a novel route for fabrication of micro-cantilevers in ferroelectric single-crystal lithium niobate (LiNbO3). Using the sequential techniques of photolithographic patterning, electric field poling, direct bonding and domain-oriented differential etching, free-standing cantilevers of dimensions 50µm × 50µm × 5 mm in the x, z and y crystallographic directions, respectively, have been fabricated.

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More information

Published date: 2002

Identifiers

Local EPrints ID: 13807
URI: https://eprints.soton.ac.uk/id/eprint/13807
ISSN: 0960-1317
PURE UUID: 86020461-f5bf-4245-9b8e-e31502a44df2
ORCID for Sakellaris Mailis: ORCID iD orcid.org/0000-0001-8100-2670
ORCID for V. Apostolopoulos: ORCID iD orcid.org/0000-0003-3733-2191
ORCID for C.B.E. Gawith: ORCID iD orcid.org/0000-0002-3502-3558
ORCID for R.W. Eason: ORCID iD orcid.org/0000-0001-9704-2204

Catalogue record

Date deposited: 12 Jan 2005
Last modified: 24 Sep 2019 00:59

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