Deposition and characterization of germanium sulphide glass planar waveguides
Deposition and characterization of germanium sulphide glass planar waveguides
Germanium sulphide glass thin films have been deposited on CaF2 and Schott N-PSK58 glass substrates directly by means of chemical vapor deposition (CVD). The deposition rate of germanium sulphide glass film by this CVD process is estimated about 12µm/hr at 500°C. These films have been characterized by micro-Raman spectroscopy, X-ray diffraction (XRD), and scanning electron microscopy (SEM). Their transmission range extends from 0.5µm to 7µm measured by UV-VIS-NIR and FT-IR spectroscopy. The refractive index of germanium sulphide glass film measured by prism coupling technique was 2.093±0.008 and the waveguide loss measured at 632.8nm by He-Ne laser was 2.1±0.3 dB/cm.
2501-2505
Huang, Chung-Che
825f7447-6d02-48f6-b95a-fa33da71f106
Hewak, Daniel W.
87c80070-c101-4f7a-914f-4cc3131e3db0
Badding, J.V.
940f7adb-73df-4f8a-9c46-e47f5425fef0
2004
Huang, Chung-Che
825f7447-6d02-48f6-b95a-fa33da71f106
Hewak, Daniel W.
87c80070-c101-4f7a-914f-4cc3131e3db0
Badding, J.V.
940f7adb-73df-4f8a-9c46-e47f5425fef0
Huang, Chung-Che, Hewak, Daniel W. and Badding, J.V.
(2004)
Deposition and characterization of germanium sulphide glass planar waveguides.
Optics Express, 12 (11), .
(doi:10.1364/OPEX.12.002501).
Abstract
Germanium sulphide glass thin films have been deposited on CaF2 and Schott N-PSK58 glass substrates directly by means of chemical vapor deposition (CVD). The deposition rate of germanium sulphide glass film by this CVD process is estimated about 12µm/hr at 500°C. These films have been characterized by micro-Raman spectroscopy, X-ray diffraction (XRD), and scanning electron microscopy (SEM). Their transmission range extends from 0.5µm to 7µm measured by UV-VIS-NIR and FT-IR spectroscopy. The refractive index of germanium sulphide glass film measured by prism coupling technique was 2.093±0.008 and the waveguide loss measured at 632.8nm by He-Ne laser was 2.1±0.3 dB/cm.
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Published date: 2004
Organisations:
Optoelectronics Research Centre
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Local EPrints ID: 13905
URI: http://eprints.soton.ac.uk/id/eprint/13905
ISSN: 1094-4087
PURE UUID: 0c339d17-89a3-47fb-8d18-c47cac6e2ffd
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Date deposited: 31 Dec 2004
Last modified: 16 Mar 2024 03:46
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Author:
Chung-Che Huang
Author:
J.V. Badding
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