Excimer laser inscribed submicron period relief gratings in INOx films and overlaid waveguides
Excimer laser inscribed submicron period relief gratings in INOx films and overlaid waveguides
Relief gratings of submicron periodicity are patterned in InOx thin oxide films using 248 nm interferometric excimer laser ablation. The ablation process is studied in terms of grating depth versus exposure conditions, using optical diffraction efficiency measurements. Real time monitoring of grating growth and film resistivity during grating writing are also presented. To study the exact grating morphology, scanning electron microscopy and atomic force microscopy microscans of the machined structures are performed. A discussion on the ablation behavior of InOx thin films is given in accordance with the experimental data obtained. Relief gratings are patterned in InOx thin films overlaid on ion-exchanged channel waveguides, and reflection spectra are also reported.
1634-1641
Pissadakis, S.
a91c54e0-3b8d-479f-b44e-e678bc34a277
Reekie, L.
ec314137-6924-44ad-86a4-ff3f9a67c1b5
Zervas, M.N.
1840a474-dd50-4a55-ab74-6f086aa3f701
Wilkinson, J.S.
73483cf3-d9f2-4688-9b09-1c84257884ca
2004
Pissadakis, S.
a91c54e0-3b8d-479f-b44e-e678bc34a277
Reekie, L.
ec314137-6924-44ad-86a4-ff3f9a67c1b5
Zervas, M.N.
1840a474-dd50-4a55-ab74-6f086aa3f701
Wilkinson, J.S.
73483cf3-d9f2-4688-9b09-1c84257884ca
Pissadakis, S., Reekie, L., Zervas, M.N. and Wilkinson, J.S.
(2004)
Excimer laser inscribed submicron period relief gratings in INOx films and overlaid waveguides.
Journal of Applied Physics, 95 (4), .
(doi:10.1063/1.1640793).
Abstract
Relief gratings of submicron periodicity are patterned in InOx thin oxide films using 248 nm interferometric excimer laser ablation. The ablation process is studied in terms of grating depth versus exposure conditions, using optical diffraction efficiency measurements. Real time monitoring of grating growth and film resistivity during grating writing are also presented. To study the exact grating morphology, scanning electron microscopy and atomic force microscopy microscans of the machined structures are performed. A discussion on the ablation behavior of InOx thin films is given in accordance with the experimental data obtained. Relief gratings are patterned in InOx thin films overlaid on ion-exchanged channel waveguides, and reflection spectra are also reported.
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Published date: 2004
Identifiers
Local EPrints ID: 13947
URI: http://eprints.soton.ac.uk/id/eprint/13947
ISSN: 0021-8979
PURE UUID: 77741aee-c453-476a-a68d-df3308ad0194
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Date deposited: 12 Jan 2005
Last modified: 16 Mar 2024 02:41
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Author:
S. Pissadakis
Author:
L. Reekie
Author:
M.N. Zervas
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