Evaluation of group 4 metal bis-cyclopentadienyl complexes with selenolate and tellurolate ligands for CVD of ME2Films (E = Se or Te)
Evaluation of group 4 metal bis-cyclopentadienyl complexes with selenolate and tellurolate ligands for CVD of ME2Films (E = Se or Te)
The selenolate and tellurolate complexes [Cp2M(SeR)2] (M = Ti, Zr, or Hf; R = Me or But) and [Cp2M(TeBut)2] (M = Zr or Hf) have been prepared and characterized by 1H, 13C{1H}, 77Se{1H} and 125Te{1H} NMR spectroscopy and microanalysis. Crystal structures of representative examples are reported, together with the structure of the oxo-bridged species [{Cp2Zr(SeMe)}2(?-O)] formed by partial hydrolysis. Trends in the NMR parameters are discussed. These molecular [Cp2M(SeBut)2] complexes are shown to be suitable as precursors for the single source LPCVD of intensely colored MSe2 thin films for each of the Group 4 elements, confirmed by SEM/EDX and PXD. These are the first examples of single source CVD of ZrSe2 and HfSe2 thin films. The corresponding [Cp2M(TeBut)2] species (M = Zr or Hf) deposit elemental Te under similar LPCVD conditions.
5100-5106
Hector, Andrew L.
f19a8f31-b37f-4474-b32a-b7cf05b9f0e5
Levason, William
e7f6d7c7-643c-49f5-8b57-0ebbe1bb52cd
Reid, Gillian
37d35b11-40ce-48c5-a68e-f6ce04cd4037
Reid, Stuart D.
50ffded0-cd9e-4565-b663-7fb5c5a7da45
Webster, Michael
f26c6e36-cb2e-486e-b2ed-b0d25a3a71f7
12 August 2008
Hector, Andrew L.
f19a8f31-b37f-4474-b32a-b7cf05b9f0e5
Levason, William
e7f6d7c7-643c-49f5-8b57-0ebbe1bb52cd
Reid, Gillian
37d35b11-40ce-48c5-a68e-f6ce04cd4037
Reid, Stuart D.
50ffded0-cd9e-4565-b663-7fb5c5a7da45
Webster, Michael
f26c6e36-cb2e-486e-b2ed-b0d25a3a71f7
Hector, Andrew L., Levason, William, Reid, Gillian, Reid, Stuart D. and Webster, Michael
(2008)
Evaluation of group 4 metal bis-cyclopentadienyl complexes with selenolate and tellurolate ligands for CVD of ME2Films (E = Se or Te).
Chemistry of Materials, 20 (15), .
(doi:10.1021/cm800802g).
Abstract
The selenolate and tellurolate complexes [Cp2M(SeR)2] (M = Ti, Zr, or Hf; R = Me or But) and [Cp2M(TeBut)2] (M = Zr or Hf) have been prepared and characterized by 1H, 13C{1H}, 77Se{1H} and 125Te{1H} NMR spectroscopy and microanalysis. Crystal structures of representative examples are reported, together with the structure of the oxo-bridged species [{Cp2Zr(SeMe)}2(?-O)] formed by partial hydrolysis. Trends in the NMR parameters are discussed. These molecular [Cp2M(SeBut)2] complexes are shown to be suitable as precursors for the single source LPCVD of intensely colored MSe2 thin films for each of the Group 4 elements, confirmed by SEM/EDX and PXD. These are the first examples of single source CVD of ZrSe2 and HfSe2 thin films. The corresponding [Cp2M(TeBut)2] species (M = Zr or Hf) deposit elemental Te under similar LPCVD conditions.
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e-pub ahead of print date: 2 July 2008
Published date: 12 August 2008
Identifiers
Local EPrints ID: 145965
URI: http://eprints.soton.ac.uk/id/eprint/145965
ISSN: 0897-4756
PURE UUID: 7ed29578-5cde-41b7-a599-c0b2670fbbda
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Date deposited: 20 Apr 2010 09:01
Last modified: 14 Mar 2024 02:39
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Author:
Stuart D. Reid
Author:
Michael Webster
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