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Supercritical chemical fluid deposition of high quality compound semiconductors

Afzaal, Mohammad, Aksomaityte, Gabriele, O'Brien, Paul, Cheng, Fei, George, Michael, Hector, Andrew, Howdle, Steven, Hyde, Jason R., Levason, William, Malik, Mohamed, Mallik, Kanad, Nguyen, Chinh, Reid, Gillian, Sazio, Pier, Smith, David, Webster, Michael, Wilson, James, Yang, Jixin and Zhang, Wenjian (2009) Supercritical chemical fluid deposition of high quality compound semiconductors ECS Transactions, 25, (8), pp. 1193-1197. (doi:10.1149/1.3207724).

Record type: Article


The main advantage of deposition from supercritical fluids over conventional CVD is the ability to fill high aspect ratio templates. Deposition of metals, indirect semiconductors and insulators into templates with dimensions down to 3 nm has been demonstrated by others, with no apparent pore blocking. In this paper we present a demonstration that it is also possible to deposit high quality, luminescent compound semiconductor films from supercritical CO2 or CO2/hexane mixtures. Depositions of CdS and III-V materials such as InP have been achieved through careful optimisation of precursor chemistry, reactor geometry and deposition conditions, supported by detailed measurements of the semiconductor film properties.

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Published date: October 2009
Organisations: Optoelectronics Research Centre


Local EPrints ID: 145985
ISSN: 1938-5862
PURE UUID: 1b2b2d2a-58e2-434b-889b-740349ea1ec5
ORCID for Andrew Hector: ORCID iD
ORCID for William Levason: ORCID iD
ORCID for Pier Sazio: ORCID iD

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Date deposited: 20 Apr 2010 09:28
Last modified: 24 Jul 2017 16:42

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Author: Mohammad Afzaal
Author: Gabriele Aksomaityte
Author: Paul O'Brien
Author: Fei Cheng
Author: Michael George
Author: Andrew Hector ORCID iD
Author: Steven Howdle
Author: Jason R. Hyde
Author: William Levason ORCID iD
Author: Mohamed Malik
Author: Kanad Mallik
Author: Chinh Nguyen
Author: Gillian Reid
Author: Pier Sazio ORCID iD
Author: David Smith
Author: Michael Webster
Author: James Wilson
Author: Jixin Yang
Author: Wenjian Zhang

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