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Fabrication of micromirrors with pyramidal shape using anisotropic etching of silicon

Fabrication of micromirrors with pyramidal shape using anisotropic etching of silicon
Fabrication of micromirrors with pyramidal shape using anisotropic etching of silicon
Gold micro-mirrors have been formed in silicon in an inverted pyramidal shape. The pyramidal structures are created in the (100) surface of a silicon wafer by anisotropic etching in potassium hydroxide. High quality micro-mirrors are then formed by sputtering gold onto the smooth silicon (111) faces of the pyramids. These mirrors show great promise as high quality optical devices suitable for integration into MOEMS systems.
0003-6951
Moktadir, Z.
d602f778-3c48-4654-aa20-d55c2e55c4b8
Vijaya Prakash, G.
658d7c66-7665-4fb8-a34e-04de8362a998
Trupke, M.
f98530de-3dcc-4b7a-ace2-ce963ddf6430
Koukharenko, E.
9fdec80f-f22b-415f-ba9b-3b6b854b37a8
Kraft, M.
a016b47e-641a-40b5-b77a-9101369e63b9
Baumberg, J.J.
78e1ea7e-8c70-404c-bf84-59aafe75cd07
Eriksson, S.
d923aae4-5aa1-4862-84b1-6aa5c6570911
Hinds, E.A.
a3f6858d-f3fc-460f-84d1-193257a88aac
Moktadir, Z.
d602f778-3c48-4654-aa20-d55c2e55c4b8
Vijaya Prakash, G.
658d7c66-7665-4fb8-a34e-04de8362a998
Trupke, M.
f98530de-3dcc-4b7a-ace2-ce963ddf6430
Koukharenko, E.
9fdec80f-f22b-415f-ba9b-3b6b854b37a8
Kraft, M.
a016b47e-641a-40b5-b77a-9101369e63b9
Baumberg, J.J.
78e1ea7e-8c70-404c-bf84-59aafe75cd07
Eriksson, S.
d923aae4-5aa1-4862-84b1-6aa5c6570911
Hinds, E.A.
a3f6858d-f3fc-460f-84d1-193257a88aac

Moktadir, Z., Vijaya Prakash, G., Trupke, M., Koukharenko, E., Kraft, M., Baumberg, J.J., Eriksson, S. and Hinds, E.A. (2005) Fabrication of micromirrors with pyramidal shape using anisotropic etching of silicon. Applied Physics Letters.

Record type: Article

Abstract

Gold micro-mirrors have been formed in silicon in an inverted pyramidal shape. The pyramidal structures are created in the (100) surface of a silicon wafer by anisotropic etching in potassium hydroxide. High quality micro-mirrors are then formed by sputtering gold onto the smooth silicon (111) faces of the pyramids. These mirrors show great promise as high quality optical devices suitable for integration into MOEMS systems.

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Submitted date: 2005

Identifiers

Local EPrints ID: 14619
URI: https://eprints.soton.ac.uk/id/eprint/14619
ISSN: 0003-6951
PURE UUID: 2190d634-a1f1-4689-8f92-8f8eca5fd42c

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Date deposited: 18 Feb 2005
Last modified: 17 Jul 2017 16:54

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