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Towards a nanostructured thermoelectric generator using ion-track lithography

Koukharenko, E., Li, X., Nandhakumar, I., Frety, N., Beeby, S.P., Cox, D., Tudor, M.J., Schiedt, B., Trautmann, C., Bertsch, A. and White, N.M. (2008) Towards a nanostructured thermoelectric generator using ion-track lithography Journal of Micromechanics and Microengineering, 18, (10), p. 104015. (doi:10.1088/0960-1317/18/10/104015).

Record type: Article


This paper presents the process development towards a new generation of nanostructured thermoelectric generators for power harvesting from small temperature gradients by using a combination of traditional silicon microfabrication techniques, electroplating and submicron ion-track nanolithography. Polyimide nanotemplates with pore diameters ranging from 30 nm to 120 nm were fabricated. Preliminary results from the fabrication of poly(methyl methacrylate) (PMMA)-nanostructured templates are reported. Bi2Te3 nanowires (80 and 120 nm diameters) were electroplated into polyimide ion-track nanotemplates. Bi2Te3 nanowires of a R3 m structure, with preferential orientation in (1 1 0) crystallographic plans, were electroplated. The chemical composition of Bi2Te3 with nearly stoichiometric composition (Bi2.31Te3) was obtained. Homogeneity profiles of the chemical composition were obtained. A fine-grained observed microstructure (6–10 nm) and (1 1 0) crystalline orientation were obtained, which is extremely promising for improving the thermoelectric material properties. The thermoelectric properties of the Bi2Te3-electroplated thin films (Seebeck coefficient ?) and electrical resistivity of the Bi2Te3 bundle nanowires were found to be ?52 ?V K?1 and ?14 M cm, respectively. Polyimide (Kapton foil) and PMMA 950 photoresists were promising materials for the realization of a nanostructured thermoelectric generator on flexible and rigid substrates, respectively

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Published date: 29 September 2008
Organisations: Chemistry


Local EPrints ID: 172225
ISSN: 0960-1317
PURE UUID: 33639889-8f3d-4c28-89ea-75fff8243497
ORCID for S.P. Beeby: ORCID iD
ORCID for N.M. White: ORCID iD

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Date deposited: 24 Jan 2011 14:16
Last modified: 24 Jul 2017 16:42

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Author: E. Koukharenko
Author: X. Li
Author: I. Nandhakumar
Author: N. Frety
Author: S.P. Beeby ORCID iD
Author: D. Cox
Author: M.J. Tudor
Author: B. Schiedt
Author: C. Trautmann
Author: A. Bertsch
Author: N.M. White ORCID iD

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