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Integrated optic glass microcantilevers with Bragg grating interrogation

Integrated optic glass microcantilevers with Bragg grating interrogation
Integrated optic glass microcantilevers with Bragg grating interrogation
A new method for creating microcantilevers in glass allows integration of optical waveguides and Bragg gratings. Devices are fabricated by high precision sawing, followed by direct UV writing of waveguides with Bragg gratings and then chemical etching to release the freestanding glass structures. Optical measurement of the Bragg gratings together with piezo-actuation allows the mechanical resonances to be probed. By measuring the mechanical damping coefficient of the cantilever as a function of the gas pressure in a vacuum system the transition from the viscous to the molecular flow regime can be observed.
1094-4087
23296-23301
Carpenter, Lewis G.
0daa548e-0d42-4b06-b914-45bfbec41759
Holmes, Christopher
16306bb8-8a46-4fd7-bb19-a146758e5263
Rogers, Helen L.
c6b6aa89-b14c-48b6-92c0-dd5c5bca683c
Smith, Peter G.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Gates, James C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Carpenter, Lewis G.
0daa548e-0d42-4b06-b914-45bfbec41759
Holmes, Christopher
16306bb8-8a46-4fd7-bb19-a146758e5263
Rogers, Helen L.
c6b6aa89-b14c-48b6-92c0-dd5c5bca683c
Smith, Peter G.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Gates, James C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2

Carpenter, Lewis G., Holmes, Christopher, Rogers, Helen L., Smith, Peter G. and Gates, James C. (2010) Integrated optic glass microcantilevers with Bragg grating interrogation. Optics Express, 18 (22), 23296-23301. (doi:10.1364/OE.18.023296).

Record type: Article

Abstract

A new method for creating microcantilevers in glass allows integration of optical waveguides and Bragg gratings. Devices are fabricated by high precision sawing, followed by direct UV writing of waveguides with Bragg gratings and then chemical etching to release the freestanding glass structures. Optical measurement of the Bragg gratings together with piezo-actuation allows the mechanical resonances to be probed. By measuring the mechanical damping coefficient of the cantilever as a function of the gas pressure in a vacuum system the transition from the viscous to the molecular flow regime can be observed.

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More information

Published date: 2010
Organisations: Optoelectronics Research Centre, Photonic Systems Circuits & Sensors, Southampton Marine & Maritime Institute, Registrar & University Executive

Identifiers

Local EPrints ID: 177009
URI: https://eprints.soton.ac.uk/id/eprint/177009
ISSN: 1094-4087
PURE UUID: 0ac868ab-6c96-4e02-9d8f-30822027e036
ORCID for Christopher Holmes: ORCID iD orcid.org/0000-0001-9021-3760
ORCID for Peter G. Smith: ORCID iD orcid.org/0000-0003-0319-718X
ORCID for James C. Gates: ORCID iD orcid.org/0000-0001-8671-5987

Catalogue record

Date deposited: 14 Mar 2011 13:43
Last modified: 17 Oct 2019 00:38

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