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Structural and optical properties of yttrium oxide thin films for planar waveguiding applications

Structural and optical properties of yttrium oxide thin films for planar waveguiding applications
Structural and optical properties of yttrium oxide thin films for planar waveguiding applications
Thin films of Yttrium Oxide, Y2O3 were deposited by reactive sputtering and reactive evaporation to determine their suitability as a host for a rare earth doped planar waveguide upconversion laser. The optical properties, structure and crystalline phase of the films were found to be dependent on the deposition method and process parameters. X-ray diffraction (XRD) analysis on the 'as-deposited' thin films revealed that the films vary from amorphous to highly crystalline with a strong peak along the <222> plane of Y2O3. The samples with the polycrystalline structure had a stoichometry close to bulk cubic Y2O3. SEM imaging revealed a regular column structure confirming their crystalline nature. The thin film layers which allowed guiding in both the visible and infra-red region had lower refractive indices, higher oxygen content and had a more amorphous structure. Higher oxygen pressures during the deposition leads to a more amorphous layer.
1388-1392
Pearce, S.J.
90b9acff-c59c-4818-b6ea-d52b91f4eca7
Parker, G.J.
edf88b88-ba05-48a5-8ae4-d6d6aa984364
Charlton, M.D.B.
fcf86ab0-8f34-411a-b576-4f684e51e274
Wilkinson, J.S.
73483cf3-d9f2-4688-9b09-1c84257884ca
Pearce, S.J.
90b9acff-c59c-4818-b6ea-d52b91f4eca7
Parker, G.J.
edf88b88-ba05-48a5-8ae4-d6d6aa984364
Charlton, M.D.B.
fcf86ab0-8f34-411a-b576-4f684e51e274
Wilkinson, J.S.
73483cf3-d9f2-4688-9b09-1c84257884ca

Pearce, S.J., Parker, G.J., Charlton, M.D.B. and Wilkinson, J.S. (2010) Structural and optical properties of yttrium oxide thin films for planar waveguiding applications. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 28 (6), 1388-1392. (doi:10.1116/1.3503621).

Record type: Article

Abstract

Thin films of Yttrium Oxide, Y2O3 were deposited by reactive sputtering and reactive evaporation to determine their suitability as a host for a rare earth doped planar waveguide upconversion laser. The optical properties, structure and crystalline phase of the films were found to be dependent on the deposition method and process parameters. X-ray diffraction (XRD) analysis on the 'as-deposited' thin films revealed that the films vary from amorphous to highly crystalline with a strong peak along the <222> plane of Y2O3. The samples with the polycrystalline structure had a stoichometry close to bulk cubic Y2O3. SEM imaging revealed a regular column structure confirming their crystalline nature. The thin film layers which allowed guiding in both the visible and infra-red region had lower refractive indices, higher oxygen content and had a more amorphous structure. Higher oxygen pressures during the deposition leads to a more amorphous layer.

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Published date: November 2010

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Local EPrints ID: 177259
URI: https://eprints.soton.ac.uk/id/eprint/177259
PURE UUID: bbd0fbdc-993d-45ac-ac98-450f0112056b
ORCID for J.S. Wilkinson: ORCID iD orcid.org/0000-0003-4712-1697

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Date deposited: 16 Mar 2011 09:27
Last modified: 19 Sep 2019 00:39

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Contributors

Author: S.J. Pearce
Author: G.J. Parker
Author: M.D.B. Charlton
Author: J.S. Wilkinson ORCID iD

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