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Fabrication of cone-shaped boron doped diamond and gold nanoelectrodes for AFM–SECM

Fabrication of cone-shaped boron doped diamond and gold nanoelectrodes for AFM–SECM
Fabrication of cone-shaped boron doped diamond and gold nanoelectrodes for AFM–SECM
We demonstrate a reliable microfabrication process for a combined atomic force microscopy (AFM) and scanning electrochemical microscopy (SECM) measurement tool. Integrated cone-shaped sensors with boron doped diamond (BDD) or gold (Au) electrodes were fabricated from commercially available AFM probes. The sensor formation process is based on mature semiconductor processing techniques, including focused ion beam (FIB) machining, and highly selective reactive ion etching (RIE). The fabrication approach preserves the geometry of the original AFM tips resulting in well reproducible nanoscaled sensors. The feasibility and functionality of the fully featured tips are demonstrated by cyclic voltammetry, showing good agreement between the measured and calculated currents of the cone-shaped AFM–SECM electrodes.


0957-4484
145306
Avdic, A.
34e82860-9a74-409b-a592-ab2ddf737394
Lugstein, A.
ff30ae06-368c-4e8f-adbf-9e2934e8faa2
Wu, M.
74ccf154-4f54-4d53-aed9-f09ab1e5d7ad
Gollas, B.
d674793a-ae37-4004-824c-f499b4aef84a
Pobelov, I.
f3e04a02-ed2c-4855-895d-b5b402a92839
Wandlowski, T.
d3d1e39f-bf4a-449e-b77f-2c7655ad71ed
Leonhardt, K.
a48e3177-8a97-4293-8ff7-a9a06467e827
Denuault, G.
5c76e69f-e04e-4be5-83c5-e729887ffd4e
Bertagnolli, E.
dbfc5718-e45d-430f-9f1c-7842d141bac2
Avdic, A.
34e82860-9a74-409b-a592-ab2ddf737394
Lugstein, A.
ff30ae06-368c-4e8f-adbf-9e2934e8faa2
Wu, M.
74ccf154-4f54-4d53-aed9-f09ab1e5d7ad
Gollas, B.
d674793a-ae37-4004-824c-f499b4aef84a
Pobelov, I.
f3e04a02-ed2c-4855-895d-b5b402a92839
Wandlowski, T.
d3d1e39f-bf4a-449e-b77f-2c7655ad71ed
Leonhardt, K.
a48e3177-8a97-4293-8ff7-a9a06467e827
Denuault, G.
5c76e69f-e04e-4be5-83c5-e729887ffd4e
Bertagnolli, E.
dbfc5718-e45d-430f-9f1c-7842d141bac2

Avdic, A., Lugstein, A., Wu, M., Gollas, B., Pobelov, I., Wandlowski, T., Leonhardt, K., Denuault, G. and Bertagnolli, E. (2011) Fabrication of cone-shaped boron doped diamond and gold nanoelectrodes for AFM–SECM. Nanotechnology, 22 (14), 145306. (doi:10.1088/0957-4484/22/14/145306). (PMID:21368355)

Record type: Article

Abstract

We demonstrate a reliable microfabrication process for a combined atomic force microscopy (AFM) and scanning electrochemical microscopy (SECM) measurement tool. Integrated cone-shaped sensors with boron doped diamond (BDD) or gold (Au) electrodes were fabricated from commercially available AFM probes. The sensor formation process is based on mature semiconductor processing techniques, including focused ion beam (FIB) machining, and highly selective reactive ion etching (RIE). The fabrication approach preserves the geometry of the original AFM tips resulting in well reproducible nanoscaled sensors. The feasibility and functionality of the fully featured tips are demonstrated by cyclic voltammetry, showing good agreement between the measured and calculated currents of the cone-shaped AFM–SECM electrodes.


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Published date: 8 April 2011

Identifiers

Local EPrints ID: 179141
URI: https://eprints.soton.ac.uk/id/eprint/179141
ISSN: 0957-4484
PURE UUID: 5c6fef6d-e5c4-43c5-a22f-1870fd3be333
ORCID for G. Denuault: ORCID iD orcid.org/0000-0002-8630-9492

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Date deposited: 01 Apr 2011 10:30
Last modified: 06 Jun 2018 13:10

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Contributors

Author: A. Avdic
Author: A. Lugstein
Author: M. Wu
Author: B. Gollas
Author: I. Pobelov
Author: T. Wandlowski
Author: K. Leonhardt
Author: G. Denuault ORCID iD
Author: E. Bertagnolli

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