Silica based micro-cantilevers fabricated using direct UV writing and micro machining for chemical and physical sensing applications
Silica based micro-cantilevers fabricated using direct UV writing and micro machining for chemical and physical sensing applications
Cantilever-based sensors have received increasing interest over recent years, offering a completely new type of miniaturised transducer with both chemical and physical monitoring capabilities. This paper presents a resonant silica micro-cantilever with direct UV written Bragg gratings intrinsically defined within it, illustrated in Figure 1 (a). To obtain quantitative and qualitative measurements the cantilever is mechanically resonated and the spectral variations in a 'sensor' Bragg grating monitored and cross referenced against a Bragg grating in the bulk. The miniaturised device offers remote, multiplexed sensing capabilities that are conducive to flammable environments.
Holmes, C.
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Carpenter, L.
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Rogers, Helen
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Gates, J.C.
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Smith, P.G.R.
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Holmes, C.
16306bb8-8a46-4fd7-bb19-a146758e5263
Carpenter, L.
0daa548e-0d42-4b06-b914-45bfbec41759
Rogers, Helen
c6b6aa89-b14c-48b6-92c0-dd5c5bca683c
Gates, J.C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, P.G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Holmes, C., Carpenter, L., Rogers, Helen, Gates, J.C. and Smith, P.G.R.
(2010)
Silica based micro-cantilevers fabricated using direct UV writing and micro machining for chemical and physical sensing applications.
11th International Symposium on Laser Precision Microfabrication: European Optical Society (EOS), , Stuttgart, Germany.
07 - 10 Jun 2010.
5 pp
.
Record type:
Conference or Workshop Item
(Paper)
Abstract
Cantilever-based sensors have received increasing interest over recent years, offering a completely new type of miniaturised transducer with both chemical and physical monitoring capabilities. This paper presents a resonant silica micro-cantilever with direct UV written Bragg gratings intrinsically defined within it, illustrated in Figure 1 (a). To obtain quantitative and qualitative measurements the cantilever is mechanically resonated and the spectral variations in a 'sensor' Bragg grating monitored and cross referenced against a Bragg grating in the bulk. The miniaturised device offers remote, multiplexed sensing capabilities that are conducive to flammable environments.
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e-pub ahead of print date: 7 June 2010
Venue - Dates:
11th International Symposium on Laser Precision Microfabrication: European Optical Society (EOS), , Stuttgart, Germany, 2010-06-07 - 2010-06-10
Identifiers
Local EPrints ID: 180397
URI: http://eprints.soton.ac.uk/id/eprint/180397
PURE UUID: 9b761dd9-1118-4cd6-9299-1abb0f56f3fd
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Date deposited: 12 Apr 2011 07:57
Last modified: 15 Mar 2024 03:27
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Contributors
Author:
L. Carpenter
Author:
Helen Rogers
Author:
J.C. Gates
Author:
P.G.R. Smith
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