Holmes, C., Carpenter, L., Rogers, Helen, Gates, J.C. and Smith, P.G.R. (2010) Silica based micro-cantilevers fabricated using direct UV writing and micro machining for chemical and physical sensing applications. 11th International Symposium on Laser Precision Microfabrication: European Optical Society (EOS), Germany. 06 - 09 Jun 2010. 5 pp .
Abstract
Cantilever-based sensors have received increasing interest over recent years, offering a completely new type of miniaturised transducer with both chemical and physical monitoring capabilities. This paper presents a resonant silica micro-cantilever with direct UV written Bragg gratings intrinsically defined within it, illustrated in Figure 1 (a). To obtain quantitative and qualitative measurements the cantilever is mechanically resonated and the spectral variations in a 'sensor' Bragg grating monitored and cross referenced against a Bragg grating in the bulk. The miniaturised device offers remote, multiplexed sensing capabilities that are conducive to flammable environments.
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- Faculties (pre 2018 reorg) > Faculty of Engineering and the Environment (pre 2018 reorg) > Southampton Marine & Maritime Institute (pre 2018 reorg)
- Faculties (pre 2018 reorg) > Faculty of Physical Sciences and Engineering (pre 2018 reorg) > Optoelectronics Research Centre (pre 2018 reorg)
Current Faculties > Faculty of Engineering and Physical Sciences > Zepler Institute for Photonics and Nanoelectronics > Optoelectronics Research Centre (pre 2018 reorg)
Zepler Institute for Photonics and Nanoelectronics > Optoelectronics Research Centre (pre 2018 reorg)
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