Quantifying the optical sensitivity of planar Bragg gratings in glass micro-cantilevers to physical deflection

Holmes, C., Carpenter, L.G., Rogers, Helen, Gates, J.C. and Smith, P.G.R. (2011) Quantifying the optical sensitivity of planar Bragg gratings in glass micro-cantilevers to physical deflection. Journal of Micromechanics and Microengineering, 21 (3), 35014. (doi:10.1088/0960-1317/21/3/035014).

Record type: Article

Abstract

Here we introduce a novel technique for characterizing the deflection and force sensitivity of a silica micro-cantilever transducer, with inherently defined planar Bragg gratings. The technique uses a 3D scanning surface profiler to deform the micro-cantilever both vertically and horizontally whilst simultaneously monitoring a set of multiplexed Bragg gratings. By using this characterization technique a theoretical model for the cantilever's optical response is tested.

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Published date: March 2011

Organisations: Optoelectronics Research Centre

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Identifiers

Local EPrints ID: 180769

URI: https://eprints.soton.ac.uk/id/eprint/180769

DOI: doi:10.1088/0960-1317/21/3/035014

ISSN: 0960-1317

PURE UUID: 56bcdc3a-530b-4ec0-91e3-f7a8f8f9c38b

ORCID for C. Holmes:

orcid.org/0000-0001-9021-3760

ORCID for J.C. Gates:

orcid.org/0000-0001-8671-5987

ORCID for P.G.R. Smith:

orcid.org/0000-0003-0319-718X

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Date deposited: 12 Apr 2011 08:29

Last modified: 17 Oct 2019 00:38

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Contributors

Author: C. Holmes

Author: L.G. Carpenter

Author: Helen Rogers

Author: J.C. Gates

Author: P.G.R. Smith

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