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Quantifying the optical sensitivity of planar Bragg gratings in glass micro-cantilevers to physical deflection

Quantifying the optical sensitivity of planar Bragg gratings in glass micro-cantilevers to physical deflection
Quantifying the optical sensitivity of planar Bragg gratings in glass micro-cantilevers to physical deflection
Here we introduce a novel technique for characterizing the deflection and force sensitivity of a silica micro-cantilever transducer, with inherently defined planar Bragg gratings. The technique uses a 3D scanning surface profiler to deform the micro-cantilever both vertically and horizontally whilst simultaneously monitoring a set of multiplexed Bragg gratings. By using this characterization technique a theoretical model for the cantilever's optical response is tested.
0960-1317
35014
Holmes, C.
16306bb8-8a46-4fd7-bb19-a146758e5263
Carpenter, L.G.
0daa548e-0d42-4b06-b914-45bfbec41759
Rogers, Helen
c6b6aa89-b14c-48b6-92c0-dd5c5bca683c
Gates, J.C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, P.G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Holmes, C.
16306bb8-8a46-4fd7-bb19-a146758e5263
Carpenter, L.G.
0daa548e-0d42-4b06-b914-45bfbec41759
Rogers, Helen
c6b6aa89-b14c-48b6-92c0-dd5c5bca683c
Gates, J.C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, P.G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6

Holmes, C., Carpenter, L.G., Rogers, Helen, Gates, J.C. and Smith, P.G.R. (2011) Quantifying the optical sensitivity of planar Bragg gratings in glass micro-cantilevers to physical deflection. Journal of Micromechanics and Microengineering, 21 (3), 35014. (doi:10.1088/0960-1317/21/3/035014).

Record type: Article

Abstract

Here we introduce a novel technique for characterizing the deflection and force sensitivity of a silica micro-cantilever transducer, with inherently defined planar Bragg gratings. The technique uses a 3D scanning surface profiler to deform the micro-cantilever both vertically and horizontally whilst simultaneously monitoring a set of multiplexed Bragg gratings. By using this characterization technique a theoretical model for the cantilever's optical response is tested.

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More information

Published date: March 2011
Organisations: Optoelectronics Research Centre

Identifiers

Local EPrints ID: 180769
URI: https://eprints.soton.ac.uk/id/eprint/180769
ISSN: 0960-1317
PURE UUID: 56bcdc3a-530b-4ec0-91e3-f7a8f8f9c38b
ORCID for C. Holmes: ORCID iD orcid.org/0000-0001-9021-3760
ORCID for J.C. Gates: ORCID iD orcid.org/0000-0001-8671-5987
ORCID for P.G.R. Smith: ORCID iD orcid.org/0000-0003-0319-718X

Catalogue record

Date deposited: 12 Apr 2011 08:29
Last modified: 17 Oct 2019 00:38

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