Quantifying the optical sensitivity of planar Bragg gratings in glass micro-cantilevers to physical deflection

Holmes, C., Carpenter, L.G., Rogers, Helen, Gates, J.C. and Smith, P.G.R. (2011) Quantifying the optical sensitivity of planar Bragg gratings in glass micro-cantilevers to physical deflection. Journal of Micromechanics and Microengineering, 21 (3), 35014. (doi:10.1088/0960-1317/21/3/035014).

Abstract

Here we introduce a novel technique for characterizing the deflection and force sensitivity of a silica micro-cantilever transducer, with inherently defined planar Bragg gratings. The technique uses a 3D scanning surface profiler to deform the micro-cantilever both vertically and horizontally whilst simultaneously monitoring a set of multiplexed Bragg gratings. By using this characterization technique a theoretical model for the cantilever's optical response is tested.

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Contributors

Author: J.C. Gates

University divisions

• Southampton Marine & Maritime Institute (pre 2018 reorg)
• Photonic Systems Circuits & Sensors (pre 2018 reorg)
• Optoelectronics Research Centre (pre 2018 reorg)

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