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Development of a fabrication process for a MEMS component from ultra fine grained alloys

Development of a fabrication process for a MEMS component from ultra fine grained alloys
Development of a fabrication process for a MEMS component from ultra fine grained alloys
Qiao, Xiao Guang
7818f3c0-44d5-417d-b25c-e3ddbd533738
Qiao, Xiao Guang
7818f3c0-44d5-417d-b25c-e3ddbd533738

Qiao, Xiao Guang (2010) Development of a fabrication process for a MEMS component from ultra fine grained alloys. University of Southampton, School of Engineering Sciences, Doctoral Thesis.

Record type: Thesis (Doctoral)
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185091thesis2.7.pdf - Other
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More information

Published date: May 2010
Organisations: University of Southampton, Engineering Mats & Surface Engineerg Gp

Identifiers

Local EPrints ID: 185091
URI: http://eprints.soton.ac.uk/id/eprint/185091
PURE UUID: 91cc9cbb-4d69-43c9-87b9-d401112d8a09

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Date deposited: 26 May 2011 14:31
Last modified: 14 Mar 2024 03:11

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Contributors

Author: Xiao Guang Qiao

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