Development of a fabrication process for a MEMS component from ultra fine grained alloys
Development of a fabrication process for a MEMS component from ultra fine grained alloys
Qiao, Xiao Guang
7818f3c0-44d5-417d-b25c-e3ddbd533738
May 2010
Qiao, Xiao Guang
7818f3c0-44d5-417d-b25c-e3ddbd533738
Qiao, Xiao Guang
(2010)
Development of a fabrication process for a MEMS component from ultra fine grained alloys.
University of Southampton, School of Engineering Sciences, Doctoral Thesis.
Record type:
Thesis
(Doctoral)
Text
185091thesis2.7.pdf
- Other
More information
Published date: May 2010
Organisations:
University of Southampton, Engineering Mats & Surface Engineerg Gp
Identifiers
Local EPrints ID: 185091
URI: http://eprints.soton.ac.uk/id/eprint/185091
PURE UUID: 91cc9cbb-4d69-43c9-87b9-d401112d8a09
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Date deposited: 26 May 2011 14:31
Last modified: 14 Mar 2024 03:11
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Contributors
Author:
Xiao Guang Qiao
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