Development of a fabrication process for a MEMS component from ultra fine grained alloys


Qiao, Xiao Guang (2010) Development of a fabrication process for a MEMS component from ultra fine grained alloys University of Southampton, School of Engineering Sciences, Doctoral Thesis .

Download

[img] PDF 185091thesis2.7.pdf - Other
Download (10MB)
Item Type: Thesis (Doctoral)
Subjects:
Organisations: University of Southampton, Engineering Mats & Surface Engineerg Gp
ePrint ID: 185091
Date :
Date Event
May 2010Published
Date Deposited: 26 May 2011 14:31
Last Modified: 18 Apr 2017 02:18
Further Information:Google Scholar
URI: http://eprints.soton.ac.uk/id/eprint/185091

Actions (login required)

View Item View Item