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Development of a fabrication process for a MEMS component from ultra fine grained alloys

Qiao, Xiao Guang (2010) Development of a fabrication process for a MEMS component from ultra fine grained alloys University of Southampton, School of Engineering Sciences, Doctoral Thesis .

Record type: Thesis (Doctoral)
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Published date: May 2010
Organisations: University of Southampton, Engineering Mats & Surface Engineerg Gp

Identifiers

Local EPrints ID: 185091
URI: http://eprints.soton.ac.uk/id/eprint/185091
PURE UUID: 91cc9cbb-4d69-43c9-87b9-d401112d8a09

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Date deposited: 26 May 2011 14:31
Last modified: 18 Jul 2017 11:50

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Contributors

Author: Xiao Guang Qiao

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