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Integrated optical differential pressure transducers achieved using thin buckled silica membranes and direct UV written planar Bragg gratings

Integrated optical differential pressure transducers achieved using thin buckled silica membranes and direct UV written planar Bragg gratings
Integrated optical differential pressure transducers achieved using thin buckled silica membranes and direct UV written planar Bragg gratings
Direct UV written differential pressure sensors have been fabricated in a silica-on-silicon platform. The reported components achieve physical sensitivity through actuating planar Bragg gratings defined within a thin (<40 µm) silica membrane. The optimised transducer exploits the condition of static membrane buckling to resolve both positive and negative pressure differentials, either side of the membrane. The fabricated device has demonstrated operation over a 202 kPa range with a 0.36 kPa resolution.
direct UV writing, Bragg gratings, silica-on-silicon, integrated optics, membrane, pressure sensing
0924-4247
14-21
Holmes, Christopher
16306bb8-8a46-4fd7-bb19-a146758e5263
Gates, James C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, P.G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6
Holmes, Christopher
16306bb8-8a46-4fd7-bb19-a146758e5263
Gates, James C.
b71e31a1-8caa-477e-8556-b64f6cae0dc2
Smith, P.G.R.
8979668a-8b7a-4838-9a74-1a7cfc6665f6

Holmes, Christopher, Gates, James C. and Smith, P.G.R. (2011) Integrated optical differential pressure transducers achieved using thin buckled silica membranes and direct UV written planar Bragg gratings. Sensors and Actuators A: Physical, 168 (1), 14-21. (doi:10.1016/j.sna.2011.03.030).

Record type: Article

Abstract

Direct UV written differential pressure sensors have been fabricated in a silica-on-silicon platform. The reported components achieve physical sensitivity through actuating planar Bragg gratings defined within a thin (<40 µm) silica membrane. The optimised transducer exploits the condition of static membrane buckling to resolve both positive and negative pressure differentials, either side of the membrane. The fabricated device has demonstrated operation over a 202 kPa range with a 0.36 kPa resolution.

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More information

Published date: July 2011
Keywords: direct UV writing, Bragg gratings, silica-on-silicon, integrated optics, membrane, pressure sensing
Organisations: Optoelectronics Research Centre

Identifiers

Local EPrints ID: 191181
URI: https://eprints.soton.ac.uk/id/eprint/191181
ISSN: 0924-4247
PURE UUID: 2f8c2fff-1df3-470c-93e1-5e026cbe6820
ORCID for Christopher Holmes: ORCID iD orcid.org/0000-0001-9021-3760
ORCID for James C. Gates: ORCID iD orcid.org/0000-0001-8671-5987
ORCID for P.G.R. Smith: ORCID iD orcid.org/0000-0003-0319-718X

Catalogue record

Date deposited: 17 Jun 2011 10:31
Last modified: 03 Dec 2019 02:01

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