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Physical sensitivity of silica micro-cantilevers fabricated using direct UV writing and micromachining

Holmes, Christopher, Carpenter, Lewis, Rogers, Helen, Gates, James C. and Smith, Peter G.R. (2011) Physical sensitivity of silica micro-cantilevers fabricated using direct UV writing and micromachining Journal of Laser Micro/Nanoengineering, 6, (1), pp. 26-30. (doi:10.2961/jlmn.2011.01.0007).

Record type: Article

Abstract

A silica micro-cantilever with intrinsically defined channel waveguide containing Bragg gratings has been fabricated using a combination of direct UV writing and physical micromachining. Through optically monitoring the response of the Bragg gratings defined within the cantilever, induced stresses can be measured at multiple locations along its length permitting multiplexed physical sensitivity. The fabricated silica cantilever is 61 µm wide, 41 µm thick and 3 mm in length. It contains three Bragg gratings and can attain ~70 nm deflection resolution.

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More information

Published date: March 2011
Organisations: Optoelectronics Research Centre, Electronics & Computer Science, Quantum, Light & Matter Group

Identifiers

Local EPrints ID: 191187
URI: http://eprints.soton.ac.uk/id/eprint/191187
ISSN: 1880-0688
PURE UUID: 7f1a694d-51c6-4d0f-bee4-b1f651c649ef
ORCID for James C. Gates: ORCID iD orcid.org/0000-0001-8671-5987

Catalogue record

Date deposited: 17 Jun 2011 10:59
Last modified: 27 Sep 2017 16:32

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