Optical and electrical properties of W-O-N coatings deposited by DC reactive sputtering
Optical and electrical properties of W-O-N coatings deposited by DC reactive sputtering
Tungsten oxynitride films (W-O-N) were prepared by DC reactive magnetron sputtering in a wide range of compositions from tungsten nitride (WN) to tungsten oxide (WO3), by changing the oxygen and nitrogen flows, fO2 and fN2, respectively. The total pressure was 0.3 Pa and the (p?+?p)/pAr ratio was kept constant at 1:1. The coatings were characterized concerning the chemical composition, structure, electrical, and optical properties by electron probe microanalysis, X-ray diffraction, four-point probe, and ellipsometry, respectively. A linear increase in the oxygen content was observed as a function of the increasing O2 flux. The composition will influence the structure and the electrical and optical properties of the coatings.
S69-S75
Parreira, Nuno M. G.
564a6d1a-2081-4b65-8b4c-c51909c4834b
Polcar, Tomas
c669b663-3ba9-4e7b-9f97-8ef5655ac6d2
Martin, Nicolas
26e9bbb7-b5f6-4253-9b06-bc7e97eb2467
Banakh, Oksana
5c579d1b-fdaa-404b-9745-069897cff70e
Cavaleiro, Albano
83fb0417-34af-4c14-b4b4-b9541e4fc652
2007
Parreira, Nuno M. G.
564a6d1a-2081-4b65-8b4c-c51909c4834b
Polcar, Tomas
c669b663-3ba9-4e7b-9f97-8ef5655ac6d2
Martin, Nicolas
26e9bbb7-b5f6-4253-9b06-bc7e97eb2467
Banakh, Oksana
5c579d1b-fdaa-404b-9745-069897cff70e
Cavaleiro, Albano
83fb0417-34af-4c14-b4b4-b9541e4fc652
Parreira, Nuno M. G., Polcar, Tomas, Martin, Nicolas, Banakh, Oksana and Cavaleiro, Albano
(2007)
Optical and electrical properties of W-O-N coatings deposited by DC reactive sputtering.
Plasma Processes and Polymers, 4 (S1), .
(doi:10.1002/ppap.200730405).
Abstract
Tungsten oxynitride films (W-O-N) were prepared by DC reactive magnetron sputtering in a wide range of compositions from tungsten nitride (WN) to tungsten oxide (WO3), by changing the oxygen and nitrogen flows, fO2 and fN2, respectively. The total pressure was 0.3 Pa and the (p?+?p)/pAr ratio was kept constant at 1:1. The coatings were characterized concerning the chemical composition, structure, electrical, and optical properties by electron probe microanalysis, X-ray diffraction, four-point probe, and ellipsometry, respectively. A linear increase in the oxygen content was observed as a function of the increasing O2 flux. The composition will influence the structure and the electrical and optical properties of the coatings.
This record has no associated files available for download.
More information
Published date: 2007
Organisations:
nCATS Group
Identifiers
Local EPrints ID: 199773
URI: http://eprints.soton.ac.uk/id/eprint/199773
ISSN: 1612-8850
PURE UUID: 658792e5-3aba-4667-b657-6ce7e507dfc2
Catalogue record
Date deposited: 20 Oct 2011 13:01
Last modified: 15 Mar 2024 03:40
Export record
Altmetrics
Contributors
Author:
Nuno M. G. Parreira
Author:
Nicolas Martin
Author:
Oksana Banakh
Author:
Albano Cavaleiro
Download statistics
Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.
View more statistics
