Synthesis and properties of W–Se–C coatings deposited by PVD in reactive and non-reactive processes

Evaristo, Manuel, Polcar, Tomas and Cavaleiro, Albano (2009) Synthesis and properties of W–Se–C coatings deposited by PVD in reactive and non-reactive processes. Vacuum, 83 (10), 1262-1265. (doi:10.1016/j.vacuum.2009.03.030).

Abstract

Transition metal dichalcogenides (TMD) are well known for their self lubricant properties, due to unique crystal structure, with low hardness which makes them inappropriate in applications requiring high load bearing capacity. Nevertheless, there is still a considerable potential for further improvements since other TMDs such as diselenides remain almost unknown. The WSeC coatings were deposited by either co-sputtering from WSe2 and C targets or by working in reactive mode in an Ar + CH4 atmosphere. Carbon content varied from 25 at.% up to 70 at.%, Se/W ratio of co-sputtered coatings was between 0.9 and 1.0, with no significant influence of the carbon content on their variations, while in the reactive process it reached values higher than 1.7. The hardness of the coatings was evaluated by nanoindentation, with values between 1.6 and 5.6 GPa. The structure of the coatings was analysed by X-ray diffraction in glancing mode, showing that the coatings have a quasi-amorphous structure. Finally, the selected samples were tested on pin-on-disc showing low friction properties of WSeC co-sputtered coatings.

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Contributors

Author: Tomas Polcar

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