Electrorheological-fluid-based microvalves

Niu, Xize, Wen, Weijia and Lee, Yi-Kuen (2005) Electrorheological-fluid-based microvalves. Applied Physics Letters, 87 (24), 243501. (doi:10.1063/1.2140070).

Record type: Article

Abstract

We present the successful design and fabrication of push-and-pull microvalves that use a giant electrorheological (GER) fluid. Our multilayer microvalves, including the GER fluid control channel, the electrode, the flow channel, and the flexible membrane, are fabricated with polydimethylsioxane-based materials by soft lithography techniques. The GER effect is able to provide high-pressure changes in GER control channel so as to fully close and open an associated flow channel. The fast response time of the GER fluid and the push-and-pull valve design adopted assure fast switching time of the valve less than 10 ms and sound reliability. This GER-fluid-based microvalve has other advantages of easy fabrication and biocompatibility and is suitable for most microfluidic applications.

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