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Submicron patterning of DNA oligonucleotides on silicon

Submicron patterning of DNA oligonucleotides on silicon
Submicron patterning of DNA oligonucleotides on silicon
The covalent attachment of DNA oligonucleotides onto crystalline silicon (100) surfaces, in patterns with submicron features, in a straightforward, two-step process is presented. UV light exposure of a hydrogen-terminated silicon (100) surface coated with alkenes functionalized with N-hydroxysuccinimide ester groups resulted in the covalent attachment of the alkene as a monolayer on the surface. Submicron-scale patterning of surfaces was achieved by illumination with an interference pattern obtained by the transmission of 248 nm excimer laser light through a phase mask. The N-hydroxysuccinimide ester surface acted as a template for the subsequent covalent attachment of aminohexyl-modified DNA-oligonucleotides. Oligonucleotide patterns, with feature sizes of 500 nm, were reliably produced over large areas. The patterned surfaces were characterized with atomic force microscopy, scanning electron microscopy, epifluorescence microscopy and ellipsometry. Complementary oligonucleotides were hybridized to the surface-attached oligonucleotides with a density of 7 x 10(12) DNA oligonucleotides per square centimetre. The method will offer much potential for the creation of nano- and micro-scale DNA biosensor devices in silicon.
self-assembled monolayers, surfaces, lithography, nanostructures, fabrication, microarrays, 1-alkenes, si(100), si(111), devices
0305-1048
e118-[7pp]
Yin, H.B.
80f33a1f-d886-4f09-adab-bc65e9125c29
Brown, T.
a64aae36-bb30-42df-88a2-11be394e8c89
Wilkinson, J.S.
73483cf3-d9f2-4688-9b09-1c84257884ca
Eason, R.W.
e38684c3-d18c-41b9-a4aa-def67283b020
Melvin, T.
fd87f5eb-2bb9-48fa-b7be-7100ace9c50f
Yin, H.B.
80f33a1f-d886-4f09-adab-bc65e9125c29
Brown, T.
a64aae36-bb30-42df-88a2-11be394e8c89
Wilkinson, J.S.
73483cf3-d9f2-4688-9b09-1c84257884ca
Eason, R.W.
e38684c3-d18c-41b9-a4aa-def67283b020
Melvin, T.
fd87f5eb-2bb9-48fa-b7be-7100ace9c50f

Yin, H.B., Brown, T., Wilkinson, J.S., Eason, R.W. and Melvin, T. (2004) Submicron patterning of DNA oligonucleotides on silicon. Nucleic Acids Research, 32 (14), e118-[7pp]. (doi:10.1093/nar/gnh113).

Record type: Article

Abstract

The covalent attachment of DNA oligonucleotides onto crystalline silicon (100) surfaces, in patterns with submicron features, in a straightforward, two-step process is presented. UV light exposure of a hydrogen-terminated silicon (100) surface coated with alkenes functionalized with N-hydroxysuccinimide ester groups resulted in the covalent attachment of the alkene as a monolayer on the surface. Submicron-scale patterning of surfaces was achieved by illumination with an interference pattern obtained by the transmission of 248 nm excimer laser light through a phase mask. The N-hydroxysuccinimide ester surface acted as a template for the subsequent covalent attachment of aminohexyl-modified DNA-oligonucleotides. Oligonucleotide patterns, with feature sizes of 500 nm, were reliably produced over large areas. The patterned surfaces were characterized with atomic force microscopy, scanning electron microscopy, epifluorescence microscopy and ellipsometry. Complementary oligonucleotides were hybridized to the surface-attached oligonucleotides with a density of 7 x 10(12) DNA oligonucleotides per square centimetre. The method will offer much potential for the creation of nano- and micro-scale DNA biosensor devices in silicon.

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More information

Published date: 1 August 2004
Keywords: self-assembled monolayers, surfaces, lithography, nanostructures, fabrication, microarrays, 1-alkenes, si(100), si(111), devices

Identifiers

Local EPrints ID: 20346
URI: http://eprints.soton.ac.uk/id/eprint/20346
ISSN: 0305-1048
PURE UUID: 47615dd8-1320-470b-9094-5186c8476c32
ORCID for J.S. Wilkinson: ORCID iD orcid.org/0000-0003-4712-1697
ORCID for R.W. Eason: ORCID iD orcid.org/0000-0001-9704-2204

Catalogue record

Date deposited: 16 Feb 2006
Last modified: 07 Oct 2020 03:07

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Contributors

Author: H.B. Yin
Author: T. Brown
Author: J.S. Wilkinson ORCID iD
Author: R.W. Eason ORCID iD
Author: T. Melvin

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