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Confined high-pressure chemical deposition of hydrogenated amorphous silicon

Baril, Neil F., He, Rongrui, Day, Todd D., Sparks, Justin R., Keshavarzi, Banafsheh, Krishnamurthi, Mahesh, Borhan, Ali, Gopalan, Venkatraman, Peacock, Anna C., Healy, Noel, Sazio, Pier J.A. and Badding, John V. (2012) Confined high-pressure chemical deposition of hydrogenated amorphous silicon Journal of the American Chemical Society, 134, (1), pp. 19-22. (doi:10.1021/ja2067862).

Record type: Article


Hydrogenated amorphous silicon (a-Si:H) is one of the most technologically important semi-conductors. The challenge in producing it from SiH4 precursor is to overcome a significant kinetic barrier to decomposition at a low enough temperature to allow for hydrogen incorporation into a deposited film. The use of high precursor concentrations is one possible means to increase reaction rates at low enough temperatures, but in conventional reactors such an approach produces large numbers of homogeneously nucleated particles in the gas phase, rather than the desired heterogeneous deposition on a surface. We report that deposition in confined micro-/nanoreactors overcomes this difficulty, allowing for the use of silane concentrations many orders of magnitude higher than conventionally employed while still realizing well-developed films. a-Si:H micro-/nanowires can be deposited in this way in extreme aspect ratio, small- diameter optical fiber capillary templates. The semi- conductor materials deposited have ~0.5 atom% hydrogen with passivated dangling bonds and good electronic properties. They should be suitable for a wide range of photonic and electronic applications such as nonlinear optical fibers and solar cells

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Published date: 8 December 2012
Organisations: Optoelectronics Research Centre


Local EPrints ID: 209063
ISSN: 0002-7863
PURE UUID: 27bea25c-7a22-460a-a21a-5d93c67c99a8
ORCID for Anna C. Peacock: ORCID iD
ORCID for Pier J.A. Sazio: ORCID iD

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Date deposited: 25 Jan 2012 14:36
Last modified: 18 Jul 2017 10:47

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Author: Neil F. Baril
Author: Rongrui He
Author: Todd D. Day
Author: Justin R. Sparks
Author: Banafsheh Keshavarzi
Author: Mahesh Krishnamurthi
Author: Ali Borhan
Author: Venkatraman Gopalan
Author: Anna C. Peacock ORCID iD
Author: Noel Healy
Author: Pier J.A. Sazio ORCID iD
Author: John V. Badding

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