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Thin (0 0 1) tungsten trioxide films grown by laser deposition

Thin (0 0 1) tungsten trioxide films grown by laser deposition
Thin (0 0 1) tungsten trioxide films grown by laser deposition
Highly textured thin (0 0 1) tungsten trioxide (WO3) films have been deposited on (0 0 1) SiO2 substrates by XeCl excimer laser ablation of ceramic targets. The influence of the oxygen pressure and substrate temperature on the composition, crystallinity and optical properties of the films has been studied. The films were grown at pressures of 1–25 Pa and substrate temperatures from room temperature up to 670 °C. The best crystallinity was obtained for the films grown at 10 Pa and 500 °C as confirmed by XRD analyses and Raman spectroscopy. Optical transmission as high as 83% has been measured in the visible and near-infrared spectral regions. The ordinary index of refraction at wavelength of 633 nm increases with the growth temperature and reaches 1.97 at the optimum growth conditions.

pulsed laser deposition, wo3 thin films, crystal structure, optical properties
0169-4332
401-405
Stankova, E.N.
565d8daf-4f37-44ba-9104-40adcbe5250a
Atanasov, P.A.
3abb0017-61cd-4929-8f76-7d1f97c6182c
Stanimirova, T.J.
ad6f949b-f927-480a-b47e-8694f8b93d19
Dikovska, A.O.
8e79ccd7-ccf3-4d90-afff-46055313e618
Eason, R.W.
e38684c3-d18c-41b9-a4aa-def67283b020
Stankova, E.N.
565d8daf-4f37-44ba-9104-40adcbe5250a
Atanasov, P.A.
3abb0017-61cd-4929-8f76-7d1f97c6182c
Stanimirova, T.J.
ad6f949b-f927-480a-b47e-8694f8b93d19
Dikovska, A.O.
8e79ccd7-ccf3-4d90-afff-46055313e618
Eason, R.W.
e38684c3-d18c-41b9-a4aa-def67283b020

Stankova, E.N., Atanasov, P.A., Stanimirova, T.J., Dikovska, A.O. and Eason, R.W. (2005) Thin (0 0 1) tungsten trioxide films grown by laser deposition. Applied Surface Science, 247 (1-4), 401-405. (doi:10.1016/j.apsusc.2005.01.057).

Record type: Article

Abstract

Highly textured thin (0 0 1) tungsten trioxide (WO3) films have been deposited on (0 0 1) SiO2 substrates by XeCl excimer laser ablation of ceramic targets. The influence of the oxygen pressure and substrate temperature on the composition, crystallinity and optical properties of the films has been studied. The films were grown at pressures of 1–25 Pa and substrate temperatures from room temperature up to 670 °C. The best crystallinity was obtained for the films grown at 10 Pa and 500 °C as confirmed by XRD analyses and Raman spectroscopy. Optical transmission as high as 83% has been measured in the visible and near-infrared spectral regions. The ordinary index of refraction at wavelength of 633 nm increases with the growth temperature and reaches 1.97 at the optimum growth conditions.

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More information

Published date: 2005
Keywords: pulsed laser deposition, wo3 thin films, crystal structure, optical properties

Identifiers

Local EPrints ID: 20998
URI: https://eprints.soton.ac.uk/id/eprint/20998
ISSN: 0169-4332
PURE UUID: ad774385-b6d1-4bb8-b0b9-a1fc71ce6903
ORCID for R.W. Eason: ORCID iD orcid.org/0000-0001-9704-2204

Catalogue record

Date deposited: 07 Mar 2006
Last modified: 20 Jul 2019 01:25

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Contributors

Author: E.N. Stankova
Author: P.A. Atanasov
Author: T.J. Stanimirova
Author: A.O. Dikovska
Author: R.W. Eason ORCID iD

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