The University of Southampton
University of Southampton Institutional Repository

Ion-implantation and diffusion behaviour of boron in germanium

Uppal, Suresh, Willoughby, A.F.W., Bonar, Janet M., Evans, Alan G.R., Cowern, Nick E.B., Morris, Richard and Dowsett, Mark G. (2001) Ion-implantation and diffusion behaviour of boron in germanium Physica B: Condensed Matter, 308-310, pp. 525-528. (doi:10.1016/S0921-4526(01)00752-9).

Record type: Article


Results are presented of implantation and diffusion study of boron (B) in germanium (Ge). B implantation was carried out in Ge with different energies and to different doses. High-resolution secondary ion mass spectroscopy was used to obtain concentration profiles after furnace annealing. The as-implanted profiles show a long tail possibly due to enhanced diffusion. A limited diffusion has been observed after furnace annealing. Using T-SUPREM, diffusivity value of 1.5(±0.3)×10?16 cm2/s at 850°C has been extracted. This value is two orders of magnitude lower than previously reported values. The results question the change in diffusion mechanism of B diffusion in Si–Ge alloys from low Ge levels to high Ge levels.

Full text not available from this repository.

More information

Published date: 2001
Keywords: germanium, boron, ion implantation, diffusion


Local EPrints ID: 21959
ISSN: 0921-4526
PURE UUID: 9d59b698-ba48-47c3-b8ec-e7a8bb8f8b0c

Catalogue record

Date deposited: 20 Mar 2006
Last modified: 17 Jul 2017 16:24

Export record



Author: Suresh Uppal
Author: A.F.W. Willoughby
Author: Janet M. Bonar
Author: Alan G.R. Evans
Author: Nick E.B. Cowern
Author: Richard Morris
Author: Mark G. Dowsett

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton:

ePrints Soton supports OAI 2.0 with a base URL of

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.