A study of the effect of fabrication parameter variation on the environmental characteristics of thick film strain gauges fabricated on steel substrates

Zheng, Y., Atkinson, J.K., Sion, R.P. and Zhang, Z. (2001) A study of the effect of fabrication parameter variation on the environmental characteristics of thick film strain gauges fabricated on steel substrates. In, International Symposium on Microelectronics. (Proceedings of SPIE, 4587) International Symposium on Microelectronics (01/01/01 - 01/01/01) Bellingham, USA. SPIE - The International Society for Optical Engineering, pp. 731-735.

Abstract

Results from a programme of research aimed at establishing the mechanisms behind the effects of fabrication parameter variation on the performance of thick film strain gauges on steel substrates are presented. The research is aimed at describing the effect on the repeatability of the device characteristics due to different choices of materials, thicknesses of gauges, firing regimes and geometrical orientation of the gauges. In particular the effects of load and temperature on the offset and gain characteristics of a variety of different sensor constructions have been explored. The sensors described here are of a type where the applied strain is parallel to the measured resistance path but orthogonal to the substrate (z[33]). It has been found that these devices exhibit different characteristics to conventional thick film strain gauges that help explain the mechanisms affecting gain and offset changes caused by temperature fluctuations and mechanical deformation.

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Contributors

Author: J.K. Atkinson

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