The University of Southampton
University of Southampton Institutional Repository

Mechanics of wafer bonding: effect of clamping

Turner, K.T., Thouless, M.D. and Spearing, S.M. (2004) Mechanics of wafer bonding: effect of clamping Journal of Applied Physics, 95, (1), pp. 349-355. (doi:10.1063/1.1629776).

Record type: Article


A mechanics-based model is developed to examine the effects of clamping during wafer bonding processes. The model provides closed-form expressions that relate the initial geometry and elastic properties of the wafers to the final shape of the bonded pair and the strain energy release rate at the interface for two different clamping configurations. The results demonstrate that the curvature of bonded pairs may be controlled through the use of specific clamping arrangements during the bonding process. Furthermore, it is demonstrated that the strain energy release rate depends on the clamping configuration and that using applied loads usually leads to an undesirable increase in the strain energy release rate. The results are discussed in detail and implications for process development and bonding tool design are highlighted.

Full text not available from this repository.

More information

Published date: 2004


Local EPrints ID: 22780
ISSN: 0021-8979
PURE UUID: 82d04d24-b41f-4ec7-82b9-1f4410b7ea65

Catalogue record

Date deposited: 13 Mar 2006
Last modified: 17 Jul 2017 16:20

Export record



Author: K.T. Turner
Author: M.D. Thouless
Author: S.M. Spearing

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton:

ePrints Soton supports OAI 2.0 with a base URL of

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.