A piezoelectric microvalve for compact high frequency high differential pressure micropumping systems
A piezoelectric microvalve for compact high frequency high differential pressure micropumping systems
A piezoelectrically driven hydraulic amplification microvalve for use in compact high-performance hydraulic pumping systems was designed, fabricated, and experimentally characterized. High-frequency, high-force actuation capabilities were enabled through the incorporation of bulk piezoelectric material elements beneath a micromachined annular tethered-piston structure. Large valve stroke at the microscale was achieved with an hydraulic amplification mechanism that amplified (40/spl times/-50/spl times/) the limited stroke of the piezoelectric material into a significantly larger motion of a micromachined valve membrane with attached valve cap. These design features enabled the valve to meet simultaneously a set of high frequency (/spl ges/1 kHz), high pressure(/spl ges/300 kPa), and large stroke (20-30 /spl mu/m) requirements not previously satisfied by other hydraulic flow regulation microvalves. This paper details the design, modeling, fabrication, assembly, and experimental characterization of this valve device. Fabrication challenges are detailed.
81-92
Roberts, D.C.
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Li, H.
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Steyn, J.L.
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Yaglioglu, O.
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Spearing, S.M.
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Schmidt, M.A.
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Hagood, N.W.
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2003
Roberts, D.C.
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Li, H.
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Steyn, J.L.
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Yaglioglu, O.
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Spearing, S.M.
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Schmidt, M.A.
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Hagood, N.W.
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Roberts, D.C., Li, H., Steyn, J.L., Yaglioglu, O., Spearing, S.M., Schmidt, M.A. and Hagood, N.W.
(2003)
A piezoelectric microvalve for compact high frequency high differential pressure micropumping systems.
Journal of Microelectromechanical Systems, 12 (1), .
(doi:10.1109/JMEMS.2002.807471).
Abstract
A piezoelectrically driven hydraulic amplification microvalve for use in compact high-performance hydraulic pumping systems was designed, fabricated, and experimentally characterized. High-frequency, high-force actuation capabilities were enabled through the incorporation of bulk piezoelectric material elements beneath a micromachined annular tethered-piston structure. Large valve stroke at the microscale was achieved with an hydraulic amplification mechanism that amplified (40/spl times/-50/spl times/) the limited stroke of the piezoelectric material into a significantly larger motion of a micromachined valve membrane with attached valve cap. These design features enabled the valve to meet simultaneously a set of high frequency (/spl ges/1 kHz), high pressure(/spl ges/300 kPa), and large stroke (20-30 /spl mu/m) requirements not previously satisfied by other hydraulic flow regulation microvalves. This paper details the design, modeling, fabrication, assembly, and experimental characterization of this valve device. Fabrication challenges are detailed.
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Published date: 2003
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Local EPrints ID: 22784
URI: http://eprints.soton.ac.uk/id/eprint/22784
ISSN: 1057-7157
PURE UUID: 2ff3e68d-94a5-4b5e-aaee-c051e2ee8f4a
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Date deposited: 10 Mar 2006
Last modified: 16 Mar 2024 03:37
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Author:
D.C. Roberts
Author:
H. Li
Author:
J.L. Steyn
Author:
O. Yaglioglu
Author:
M.A. Schmidt
Author:
N.W. Hagood
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