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A piezoelectric microvalve for compact high frequency high differential pressure micropumping systems

A piezoelectric microvalve for compact high frequency high differential pressure micropumping systems
A piezoelectric microvalve for compact high frequency high differential pressure micropumping systems
A piezoelectrically driven hydraulic amplification microvalve for use in compact high-performance hydraulic pumping systems was designed, fabricated, and experimentally characterized. High-frequency, high-force actuation capabilities were enabled through the incorporation of bulk piezoelectric material elements beneath a micromachined annular tethered-piston structure. Large valve stroke at the microscale was achieved with an hydraulic amplification mechanism that amplified (40/spl times/-50/spl times/) the limited stroke of the piezoelectric material into a significantly larger motion of a micromachined valve membrane with attached valve cap. These design features enabled the valve to meet simultaneously a set of high frequency (/spl ges/1 kHz), high pressure(/spl ges/300 kPa), and large stroke (20-30 /spl mu/m) requirements not previously satisfied by other hydraulic flow regulation microvalves. This paper details the design, modeling, fabrication, assembly, and experimental characterization of this valve device. Fabrication challenges are detailed.
1057-7157
81-92
Roberts, D.C.
0c1ea4ed-510b-4357-b273-5f22e5cc71cd
Li, H.
e6f231b5-28cd-425f-b136-55ceab5d00db
Steyn, J.L.
020ff5b9-4a27-43b0-ba72-fcd3b1bde6d5
Yaglioglu, O.
0be6a095-86de-493f-8675-29aae91470a4
Spearing, S.M.
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Schmidt, M.A.
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Hagood, N.W.
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Roberts, D.C.
0c1ea4ed-510b-4357-b273-5f22e5cc71cd
Li, H.
e6f231b5-28cd-425f-b136-55ceab5d00db
Steyn, J.L.
020ff5b9-4a27-43b0-ba72-fcd3b1bde6d5
Yaglioglu, O.
0be6a095-86de-493f-8675-29aae91470a4
Spearing, S.M.
9e56a7b3-e0e8-47b1-a6b4-db676ed3c17a
Schmidt, M.A.
70d8449e-0448-4aab-89a5-59d61de752ad
Hagood, N.W.
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Roberts, D.C., Li, H., Steyn, J.L., Yaglioglu, O., Spearing, S.M., Schmidt, M.A. and Hagood, N.W. (2003) A piezoelectric microvalve for compact high frequency high differential pressure micropumping systems. Journal of Microelectromechanical Systems, 12 (1), 81-92. (doi:10.1109/JMEMS.2002.807471).

Record type: Article

Abstract

A piezoelectrically driven hydraulic amplification microvalve for use in compact high-performance hydraulic pumping systems was designed, fabricated, and experimentally characterized. High-frequency, high-force actuation capabilities were enabled through the incorporation of bulk piezoelectric material elements beneath a micromachined annular tethered-piston structure. Large valve stroke at the microscale was achieved with an hydraulic amplification mechanism that amplified (40/spl times/-50/spl times/) the limited stroke of the piezoelectric material into a significantly larger motion of a micromachined valve membrane with attached valve cap. These design features enabled the valve to meet simultaneously a set of high frequency (/spl ges/1 kHz), high pressure(/spl ges/300 kPa), and large stroke (20-30 /spl mu/m) requirements not previously satisfied by other hydraulic flow regulation microvalves. This paper details the design, modeling, fabrication, assembly, and experimental characterization of this valve device. Fabrication challenges are detailed.

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Published date: 2003

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Local EPrints ID: 22784
URI: http://eprints.soton.ac.uk/id/eprint/22784
ISSN: 1057-7157
PURE UUID: 2ff3e68d-94a5-4b5e-aaee-c051e2ee8f4a
ORCID for S.M. Spearing: ORCID iD orcid.org/0000-0002-3059-2014

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Date deposited: 10 Mar 2006
Last modified: 16 Mar 2024 03:37

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Contributors

Author: D.C. Roberts
Author: H. Li
Author: J.L. Steyn
Author: O. Yaglioglu
Author: S.M. Spearing ORCID iD
Author: M.A. Schmidt
Author: N.W. Hagood

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