The 3D measurement and analysis of high precision surfaces using con-focal optical methods
The 3D measurement and analysis of high precision surfaces using con-focal optical methods
The paper reviews methods for the measurement and analysis of high precision surfaces. A number of measurement techniques are discussed with the emphasis on the application of con-focal methods. The various techniques are compared in terms of measurement times, data density, and the ability to detect near vertical surfaces, and steps. The two sensing methods discussed are the auto-focus laser method and the white light methods. Particular applications considered are in the measurement of eroded electrical contact surfaces, spherical and near spherical surfaces, and MEMS. The particular emphasis here is on the metrology of such surfaces and devices and methods for the assessment of complex micro-machined surfaces. The paper points to a number of directions for improved metrology and discusses these in the context of the application given.
3D surface scanning, micro-metrology, mems, contact erosion, con-focal methods
1261-1267
McBride, John
d9429c29-9361-4747-9ba3-376297cb8770
Maul, Christian
c19cb80b-1d13-451d-83df-36f244f9d9db
2004
McBride, John
d9429c29-9361-4747-9ba3-376297cb8770
Maul, Christian
c19cb80b-1d13-451d-83df-36f244f9d9db
McBride, John and Maul, Christian
(2004)
The 3D measurement and analysis of high precision surfaces using con-focal optical methods.
IEICE Transactions on Communications, E87-C (8), .
Abstract
The paper reviews methods for the measurement and analysis of high precision surfaces. A number of measurement techniques are discussed with the emphasis on the application of con-focal methods. The various techniques are compared in terms of measurement times, data density, and the ability to detect near vertical surfaces, and steps. The two sensing methods discussed are the auto-focus laser method and the white light methods. Particular applications considered are in the measurement of eroded electrical contact surfaces, spherical and near spherical surfaces, and MEMS. The particular emphasis here is on the metrology of such surfaces and devices and methods for the assessment of complex micro-machined surfaces. The paper points to a number of directions for improved metrology and discusses these in the context of the application given.
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Published date: 2004
Keywords:
3D surface scanning, micro-metrology, mems, contact erosion, con-focal methods
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Local EPrints ID: 22864
URI: http://eprints.soton.ac.uk/id/eprint/22864
ISSN: 0916-8516
PURE UUID: f7169e53-d26f-41f8-b239-d039b111b830
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Date deposited: 27 Mar 2006
Last modified: 02 Jul 2022 01:34
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Author:
Christian Maul
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