Self-assembly of micro- and nanoparticles on internal micromachined silicon surfaces

Srikar, Vengallatore, Peles, Yoav, Arana, Leonel R. and Spearing, S.Mark (2004) Self-assembly of micro- and nanoparticles on internal micromachined silicon surfaces. Sensors and Actuators A: Physical, 113 (1), 124-131. (doi:10.1016/j.sna.2004.03.066).

Abstract

We report a simple and versatile processing technique, based on convective self-assembly, to form ordered arrays of colloidal micro- and nanoparticles on the internal surfaces of geometrically complex, bulk-micromachined silicon structures. The self-assembled layers are densely packed, exhibit excellent surface coverage over large (not, vert, similarmm2) areas, and contain a low density of crystallographic defects. Potential applications include, but are not limited to, (i) the incorporation of catalysts into microchemical reactors and (ii) colloidal lithography on internal surfaces for controlling biocompatibility in microsystems used in biology and medicine.

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Contributors

Author: S.Mark Spearing

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