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Nonlinear buckling of microfabricated thin annular plates

Su, Y.H. and Spearing, S.M. (2004) Nonlinear buckling of microfabricated thin annular plates Thin-Walled Structures, 42, (11), pp. 1543-65. (doi:10.1016/j.tws.2004.05.006).

Record type: Article


Annular plate structures are commonly used in MEMS devices, particularly in pumps and valves. In MEMS applications, large nonlinear deflections are routinely achieved. In this paper, the nonlinear buckling of a thin elastic annular plate under a compressive radial force acting in the plane of the plate is considered. Although the critical loads at which buckling starts can be determined by solving a linear eigenvalue problem, the large deflection behavior of a buckled plate beyond the critical loads can be described by the nonlinear theory proposed by von Kármán. The buckling loads of the annular plate for various boundary conditions are calculated and the post-buckling behaviors are examined. Interestingly, the buckling of an annular plate exhibits a supercritical pitchfork bifurcation. Thus, the post-buckling behavior is stable and will not collapse catastrophically. Several design implications for microfabricated structures, in particular microvalves, are also given.

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Published date: 2004
Keywords: thin annular plate, post-buckling, supercritical, pitchfork bifurcation, snap-through, MEMS, microvalve
Organisations: Engineering Mats & Surface Engineerg Gp


Local EPrints ID: 23000
ISSN: 0263-8231
PURE UUID: c206bb66-9f6a-4d25-8e2f-ecfb4ab86e11

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Date deposited: 13 Mar 2006
Last modified: 17 Jul 2017 16:19

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