The University of Southampton
University of Southampton Institutional Repository

A high-frequency, high-stiffness piezoelectric actuator for microhydraulic applications

A high-frequency, high-stiffness piezoelectric actuator for microhydraulic applications
A high-frequency, high-stiffness piezoelectric actuator for microhydraulic applications
A piezoelectric actuator capable of high-frequency, high-stiffness actuation in microhydraulic systems was fabricated and experimentally characterized to frequencies in excess of 100 kHz. This high-frequency, high-stiffness actuation is enabled through integration of bulk piezoelectric cylinders (1 mm×1 mm) beneath a silicon micromachined tethered piston structure using a thin-film AuSn eutectic alloy as the piezoelectric-to-silicon bond layer. The actuator structure, with dimensions 10 mm×10 mm×2 mm, is comprised of a bonded stack of micromachined silicon, silicon-on-insulator (SOI), and borosilicate glass layers. Devices were successfully fabricated and tested that incorporate polycrystalline PZT-5H and single-crystal PZN-PT piezoelectric material arranged in different configurations. The microfabrication, device assembly, experimental testing procedures, and actuator performance are discussed in this paper. Issues such as piezoelectric material preparation, requisite dimensional tolerancing, micromachining of the silicon tethered structures, and integration of different arrangements of piezoelectric elements within the actuator structure are detailed.
actuator, piezoelectric, micromachined, eutectic, MEMS
0924-4247
620-631
Roberts, David C.
d7b92127-be63-4c0e-81ce-0476c15877c8
Li, Hanqing
5bf64a7c-dc87-4db0-b5dc-25bf0580545e
Steyn, J. Lodewyk
ad54529c-334b-43f6-aa45-3c7023ef464b
Turner, Kevin T.
aebd795a-61ba-40c4-a2db-f3548f39557a
Mlcak, Richard
a384d59b-190b-4af7-8599-4e8c3c1e9a53
Saggere, Laxminarayana
ad29b03f-e9c2-44f3-a4ff-52bacf5f15eb
Spearing, S. Mark
9e56a7b3-e0e8-47b1-a6b4-db676ed3c17a
Schmidt, Martin A.
994a58dc-71f0-45d9-96d1-f0d9cd421c56
Haggod, Nesbitt W.
02820a55-e6df-4d39-985d-1e108d9eadb4
Roberts, David C.
d7b92127-be63-4c0e-81ce-0476c15877c8
Li, Hanqing
5bf64a7c-dc87-4db0-b5dc-25bf0580545e
Steyn, J. Lodewyk
ad54529c-334b-43f6-aa45-3c7023ef464b
Turner, Kevin T.
aebd795a-61ba-40c4-a2db-f3548f39557a
Mlcak, Richard
a384d59b-190b-4af7-8599-4e8c3c1e9a53
Saggere, Laxminarayana
ad29b03f-e9c2-44f3-a4ff-52bacf5f15eb
Spearing, S. Mark
9e56a7b3-e0e8-47b1-a6b4-db676ed3c17a
Schmidt, Martin A.
994a58dc-71f0-45d9-96d1-f0d9cd421c56
Haggod, Nesbitt W.
02820a55-e6df-4d39-985d-1e108d9eadb4

Roberts, David C., Li, Hanqing, Steyn, J. Lodewyk, Turner, Kevin T., Mlcak, Richard, Saggere, Laxminarayana, Spearing, S. Mark, Schmidt, Martin A. and Haggod, Nesbitt W. (2002) A high-frequency, high-stiffness piezoelectric actuator for microhydraulic applications. Sensors and Actuators A: Physical, 97-98, 620-631. (doi:10.1016/S0924-4247(01)00841-X).

Record type: Article

Abstract

A piezoelectric actuator capable of high-frequency, high-stiffness actuation in microhydraulic systems was fabricated and experimentally characterized to frequencies in excess of 100 kHz. This high-frequency, high-stiffness actuation is enabled through integration of bulk piezoelectric cylinders (1 mm×1 mm) beneath a silicon micromachined tethered piston structure using a thin-film AuSn eutectic alloy as the piezoelectric-to-silicon bond layer. The actuator structure, with dimensions 10 mm×10 mm×2 mm, is comprised of a bonded stack of micromachined silicon, silicon-on-insulator (SOI), and borosilicate glass layers. Devices were successfully fabricated and tested that incorporate polycrystalline PZT-5H and single-crystal PZN-PT piezoelectric material arranged in different configurations. The microfabrication, device assembly, experimental testing procedures, and actuator performance are discussed in this paper. Issues such as piezoelectric material preparation, requisite dimensional tolerancing, micromachining of the silicon tethered structures, and integration of different arrangements of piezoelectric elements within the actuator structure are detailed.

Full text not available from this repository.

More information

Published date: 2002
Keywords: actuator, piezoelectric, micromachined, eutectic, MEMS

Identifiers

Local EPrints ID: 23017
URI: http://eprints.soton.ac.uk/id/eprint/23017
ISSN: 0924-4247
PURE UUID: 215118bd-a7fd-4bc7-a827-d7a3ea6495ef
ORCID for S. Mark Spearing: ORCID iD orcid.org/0000-0002-3059-2014

Catalogue record

Date deposited: 10 Mar 2006
Last modified: 01 May 2021 01:39

Export record

Altmetrics

Contributors

Author: David C. Roberts
Author: Hanqing Li
Author: J. Lodewyk Steyn
Author: Kevin T. Turner
Author: Richard Mlcak
Author: Laxminarayana Saggere
Author: Martin A. Schmidt
Author: Nesbitt W. Haggod

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×