Structural design of a silicon micro turbo generator
Structural design of a silicon micro turbo generator
The probabilistic structural analysis and design of a silicon micro-turbo-generator rotor are presented. This rotor was designed to have a tip speed of 500 m/s. Three-dimensional finite element analysis, fracture strength characterization of single crystal silicon,and structural failure probability calculations were performed. The results show that the design of micro-turbine-generator rotor, although highly stressed, is feasible. However, it is important to note that this feasibility is very dependent on the etching process achieving a high surface quality. The overall approach and tests employed are equally applicable to other highly stressed microelectromechanical systems.
720-728
Chen, Kuo-Shen
948bab7a-ad0b-4d67-bdda-a8b1f5bcaae2
Spearing, S.M.
9e56a7b3-e0e8-47b1-a6b4-db676ed3c17a
Nemeth, Noel N.
c82b42f2-e384-4fb5-abd4-9b209694d4cd
2001
Chen, Kuo-Shen
948bab7a-ad0b-4d67-bdda-a8b1f5bcaae2
Spearing, S.M.
9e56a7b3-e0e8-47b1-a6b4-db676ed3c17a
Nemeth, Noel N.
c82b42f2-e384-4fb5-abd4-9b209694d4cd
Chen, Kuo-Shen, Spearing, S.M. and Nemeth, Noel N.
(2001)
Structural design of a silicon micro turbo generator.
AIAA Journal, 39, .
Abstract
The probabilistic structural analysis and design of a silicon micro-turbo-generator rotor are presented. This rotor was designed to have a tip speed of 500 m/s. Three-dimensional finite element analysis, fracture strength characterization of single crystal silicon,and structural failure probability calculations were performed. The results show that the design of micro-turbine-generator rotor, although highly stressed, is feasible. However, it is important to note that this feasibility is very dependent on the etching process achieving a high surface quality. The overall approach and tests employed are equally applicable to other highly stressed microelectromechanical systems.
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Published date: 2001
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Local EPrints ID: 23086
URI: http://eprints.soton.ac.uk/id/eprint/23086
ISSN: 0001-1452
PURE UUID: ebe65d8f-1f87-49ee-a676-3d053de7973c
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Date deposited: 10 Mar 2006
Last modified: 08 Jan 2022 02:59
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Author:
Kuo-Shen Chen
Author:
Noel N. Nemeth
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