Materials Issues in MEMS
Materials Issues in MEMS
Microelectromechanical systems (MEMS) have recently become an important area of technology, building on the success of the microelectronics industry over the past 50 years. MEMS combine mechanical and electrical function in devices at very small scales. Examples include pressure sensors, accelerometers, gyroscopes and optical devices, as well as chemical, biomedical and fluidic applications. The status of MEMS technology is reviewed with particular emphasis on materials issues therein. The materials issues in MEMS are divided into three categories, the MEMS material set, microfabrication processes, and material characterization and design. Each of these areas is addressed, with particular emphasis on the potential impact of materials solutions. A discussion of the future of MEMS and the role of materials in that future is given.
microelectromechanical systems, scaling, microfabrication, material selection, mechanical properties
179-196
Spearing, S.M.
9e56a7b3-e0e8-47b1-a6b4-db676ed3c17a
2000
Spearing, S.M.
9e56a7b3-e0e8-47b1-a6b4-db676ed3c17a
Abstract
Microelectromechanical systems (MEMS) have recently become an important area of technology, building on the success of the microelectronics industry over the past 50 years. MEMS combine mechanical and electrical function in devices at very small scales. Examples include pressure sensors, accelerometers, gyroscopes and optical devices, as well as chemical, biomedical and fluidic applications. The status of MEMS technology is reviewed with particular emphasis on materials issues therein. The materials issues in MEMS are divided into three categories, the MEMS material set, microfabrication processes, and material characterization and design. Each of these areas is addressed, with particular emphasis on the potential impact of materials solutions. A discussion of the future of MEMS and the role of materials in that future is given.
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Published date: 2000
Keywords:
microelectromechanical systems, scaling, microfabrication, material selection, mechanical properties
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Local EPrints ID: 23089
URI: http://eprints.soton.ac.uk/id/eprint/23089
ISSN: 1359-6454
PURE UUID: e7a84795-9672-493e-9ffb-d151b370b35f
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Date deposited: 02 Feb 2007
Last modified: 16 Mar 2024 03:37
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