The University of Southampton
×
Filter your search:
University of Southampton Institutional Repository

A PZT multilayer actuator for ultrasonic applications

A PZT multilayer actuator for ultrasonic applications
A PZT multilayer actuator for ultrasonic applications
In many MEMS applications there is a requirement for actuating a structure. This paper describes a method of generating acoustic power from a PZT based thick-film structure which gives output power and electrical efficiencies at least as good as, and in some cases better than bulk PZT in the same application.
thick-film, actuation, ultrasonic
17-20
Harris, N.R.
237cfdbd-86e4-4025-869c-c85136f14dfd
Torah, R.N.
7147b47b-db01-4124-95dc-90d6a9842688
White, N. M.
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Hill, M.
0cda65c8-a70f-476f-b126-d2c4460a253e
Beeby, S.P.
ba565001-2812-4300-89f1-fe5a437ecb0d
Harris, N.R.
237cfdbd-86e4-4025-869c-c85136f14dfd
Torah, R.N.
7147b47b-db01-4124-95dc-90d6a9842688
White, N. M.
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Hill, M.
0cda65c8-a70f-476f-b126-d2c4460a253e
Beeby, S.P.
ba565001-2812-4300-89f1-fe5a437ecb0d

Harris, N.R., Torah, R.N., White, N. M., Hill, M. and Beeby, S.P. (2004) A PZT multilayer actuator for ultrasonic applications. 15th MicroMechanics Europe Workshop, , Leuven, Belgium. 04 - 06 Sep 2004. pp. 17-20 .

Record type: Conference or Workshop Item (Paper)

Abstract

In many MEMS applications there is a requirement for actuating a structure. This paper describes a method of generating acoustic power from a PZT based thick-film structure which gives output power and electrical efficiencies at least as good as, and in some cases better than bulk PZT in the same application.

This record has no associated files available for download.

More information

Published date: 2004
Venue - Dates: 15th MicroMechanics Europe Workshop, , Leuven, Belgium, 2004-09-04 - 2004-09-06
Related URLs:
Keywords: thick-film, actuation, ultrasonic
Learn more about Engineering Sciences research

Identifiers

Local EPrints ID: 23152
URI: http://eprints.soton.ac.uk/id/eprint/23152
PURE UUID: 43a6ccb5-528b-4f35-b6d2-852845e64ead
ORCID for N.R. Harris: ORCID iD orcid.org/0000-0003-4122-2219
ORCID for R.N. Torah: ORCID iD orcid.org/0000-0002-5598-2860
ORCID for N. M. White: ORCID iD orcid.org/0000-0003-1532-6452
ORCID for M. Hill: ORCID iD orcid.org/0000-0001-6448-9448
ORCID for S.P. Beeby: ORCID iD orcid.org/0000-0002-0800-1759

Catalogue record

Date deposited: 01 Jun 2006
Last modified: 09 Jan 2022 03:16

Export record

Contributors

Author: N.R. Harris ORCID iD
Author: R.N. Torah ORCID iD
Author: N. M. White ORCID iD
Author: M. Hill ORCID iD
Author: S.P. Beeby ORCID iD

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Library staff additional information
Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×