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A PZT multilayer actuator for ultrasonic applications

A PZT multilayer actuator for ultrasonic applications
A PZT multilayer actuator for ultrasonic applications
In many MEMS applications there is a requirement for actuating a structure. This paper describes a method of generating acoustic power from a PZT based thick-film structure which gives output power and electrical efficiencies at least as good as, and in some cases better than bulk PZT in the same application.
thick-film, actuation, ultrasonic
17-20
Harris, N.R.
237cfdbd-86e4-4025-869c-c85136f14dfd
Torah, R.N.
7147b47b-db01-4124-95dc-90d6a9842688
White, N. M.
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Hill, M.
0cda65c8-a70f-476f-b126-d2c4460a253e
Beeby, S.P.
ba565001-2812-4300-89f1-fe5a437ecb0d
Harris, N.R.
237cfdbd-86e4-4025-869c-c85136f14dfd
Torah, R.N.
7147b47b-db01-4124-95dc-90d6a9842688
White, N. M.
c7be4c26-e419-4e5c-9420-09fc02e2ac9c
Hill, M.
0cda65c8-a70f-476f-b126-d2c4460a253e
Beeby, S.P.
ba565001-2812-4300-89f1-fe5a437ecb0d

Harris, N.R., Torah, R.N., White, N. M., Hill, M. and Beeby, S.P. (2004) A PZT multilayer actuator for ultrasonic applications. 15th MicroMechanics Europe Workshop, , Leuven, Belgium. 04 - 06 Sep 2004. pp. 17-20 .

Record type: Conference or Workshop Item (Paper)

Abstract

In many MEMS applications there is a requirement for actuating a structure. This paper describes a method of generating acoustic power from a PZT based thick-film structure which gives output power and electrical efficiencies at least as good as, and in some cases better than bulk PZT in the same application.

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More information

Published date: 2004
Venue - Dates: 15th MicroMechanics Europe Workshop, , Leuven, Belgium, 2004-09-04 - 2004-09-06
Keywords: thick-film, actuation, ultrasonic

Identifiers

Local EPrints ID: 23152
URI: http://eprints.soton.ac.uk/id/eprint/23152
PURE UUID: 43a6ccb5-528b-4f35-b6d2-852845e64ead
ORCID for N.R. Harris: ORCID iD orcid.org/0000-0003-4122-2219
ORCID for R.N. Torah: ORCID iD orcid.org/0000-0002-5598-2860
ORCID for N. M. White: ORCID iD orcid.org/0000-0003-1532-6452
ORCID for M. Hill: ORCID iD orcid.org/0000-0001-6448-9448
ORCID for S.P. Beeby: ORCID iD orcid.org/0000-0002-0800-1759

Catalogue record

Date deposited: 01 Jun 2006
Last modified: 09 Jan 2022 03:16

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Contributors

Author: N.R. Harris ORCID iD
Author: R.N. Torah ORCID iD
Author: N. M. White ORCID iD
Author: M. Hill ORCID iD
Author: S.P. Beeby ORCID iD

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