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A PZT multilayer actuator for ultrasonic applications

Harris, N.R., Torah, R.N., White, N. M., Hill, M. and Beeby, S.P. (2004) A PZT multilayer actuator for ultrasonic applications At The 15th Micromechanics Europe Workshop. 05 - 07 Sep 2004. 4 pp, pp. 17-20.

Record type: Conference or Workshop Item (Paper)


In many MEMS applications there is a requirement for actuating a structure. This paper describes a method of generating acoustic power from a PZT based thick-film structure which gives output power and electrical efficiencies at least as good as, and in some cases better than bulk PZT in the same application.

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Published date: 2004
Venue - Dates: The 15th Micromechanics Europe Workshop, 2004-09-05 - 2004-09-07
Keywords: thick-film, actuation, ultrasonic


Local EPrints ID: 23152
PURE UUID: 43a6ccb5-528b-4f35-b6d2-852845e64ead
ORCID for N.R. Harris: ORCID iD
ORCID for N. M. White: ORCID iD
ORCID for M. Hill: ORCID iD
ORCID for S.P. Beeby: ORCID iD

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Date deposited: 01 Jun 2006
Last modified: 17 Jul 2017 16:19

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Author: N.R. Harris ORCID iD
Author: R.N. Torah
Author: N. M. White ORCID iD
Author: M. Hill ORCID iD
Author: S.P. Beeby ORCID iD

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