Luo, J.K., He, J.H., Flewitt, A.J., Spearing, S.M., Fleck, N.A. and Milne, W.I. (2004) Bimorph structure microgripper using diamond like carbon and metal. 5th international conference on Advanced Semiconductor Devices and Microsystems, Smolenice, Slovakia. 16 - 20 Oct 2004.
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Published date: 2004
Venue - Dates:
5th international conference on Advanced Semiconductor Devices and Microsystems, Smolenice, Slovakia, 2004-10-16 - 2004-10-20
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Local EPrints ID: 23278
URI: http://eprints.soton.ac.uk/id/eprint/23278
PURE UUID: d1efe823-1a24-49b2-a87f-fdefc90a766b
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Date deposited: 14 Mar 2006
Last modified: 12 Dec 2021 03:26
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Contributors
Author:
J.K. Luo
Author:
J.H. He
Author:
A.J. Flewitt
Author:
N.A. Fleck
Author:
W.I. Milne
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