The University of Southampton
University of Southampton Institutional Repository

Materials science of microelectromechanical systems (MEMS) devices IV

Materials science of microelectromechanical systems (MEMS) devices IV
Materials science of microelectromechanical systems (MEMS) devices IV
In recent years, microelectromechanical systems (MEMS) have successfully acceded to several markets, including pressure sensors, gyroscopes, accelerometers, fluidics and data storage, representing a total revenue of some $2 billion in 2000. However, MEMS has the potential to offer reliable and cost-effective solutions to many other fields. In fact, current market predictions place the total sales of MEMS devices in excess of $7 billion in 2005. The current expectation, then, is that we will witness in the near future the appearance of diverse MEMS structures for power generation, propulsion, biomedical applications, optical switching, infrared sensing, microphones and displays, to name just a few. This plethora of activity is possible due to the increased understanding of the properties of the micromanufacturing materials involved, the availability of processing equipment with enhanced capabilities, and the effort of a large number of researchers and scientists. This fourth volume in a popular series from MRS focuses on the materials science of MEMS structures and the films involved to create those structures. Although much remains to be done and understood, the current market penetration of MEMS devices already demonstrates that the effort has proceeded in the right direction. Topics include: applications metrology; mechanical properties; microstructure and processing; applications; processing techniques; alternative materials; and surface engineering issues in MEMS structures and devices.
1558996230
Materials Research Society
Ayon, Arturo A.
92156dae-c6b9-4c80-bfcb-1704d2f2213f
Buchheit, Thomas E.
a75be89d-4a56-442f-a866-c5d202cb2552
Kahn, Harold
3d40b533-af98-472d-a6e2-c5e961f86f21
Spearing, S.M.
9e56a7b3-e0e8-47b1-a6b4-db676ed3c17a
Ayon, Arturo A.
92156dae-c6b9-4c80-bfcb-1704d2f2213f
Buchheit, Thomas E.
a75be89d-4a56-442f-a866-c5d202cb2552
Kahn, Harold
3d40b533-af98-472d-a6e2-c5e961f86f21
Spearing, S.M.
9e56a7b3-e0e8-47b1-a6b4-db676ed3c17a

Ayon, Arturo A., Buchheit, Thomas E., Kahn, Harold and Spearing, S.M. (eds.) (2002) Materials science of microelectromechanical systems (MEMS) devices IV , vol. 687, Materials Research Society, 318pp.

Record type: Book

Abstract

In recent years, microelectromechanical systems (MEMS) have successfully acceded to several markets, including pressure sensors, gyroscopes, accelerometers, fluidics and data storage, representing a total revenue of some $2 billion in 2000. However, MEMS has the potential to offer reliable and cost-effective solutions to many other fields. In fact, current market predictions place the total sales of MEMS devices in excess of $7 billion in 2005. The current expectation, then, is that we will witness in the near future the appearance of diverse MEMS structures for power generation, propulsion, biomedical applications, optical switching, infrared sensing, microphones and displays, to name just a few. This plethora of activity is possible due to the increased understanding of the properties of the micromanufacturing materials involved, the availability of processing equipment with enhanced capabilities, and the effort of a large number of researchers and scientists. This fourth volume in a popular series from MRS focuses on the materials science of MEMS structures and the films involved to create those structures. Although much remains to be done and understood, the current market penetration of MEMS devices already demonstrates that the effort has proceeded in the right direction. Topics include: applications metrology; mechanical properties; microstructure and processing; applications; processing techniques; alternative materials; and surface engineering issues in MEMS structures and devices.

Full text not available from this repository.

More information

Published date: 2002

Identifiers

Local EPrints ID: 23286
URI: http://eprints.soton.ac.uk/id/eprint/23286
ISBN: 1558996230
PURE UUID: cbb0d2fb-d943-43a9-9807-61e8e6da94f3
ORCID for S.M. Spearing: ORCID iD orcid.org/0000-0002-3059-2014

Catalogue record

Date deposited: 13 Mar 2006
Last modified: 13 Mar 2021 02:38

Export record

Contributors

Editor: Arturo A. Ayon
Editor: Thomas E. Buchheit
Editor: Harold Kahn
Editor: S.M. Spearing ORCID iD

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of http://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×