The University of Southampton
University of Southampton Institutional Repository

MEMS actuators and sensors: observations on their performance and selection for purpose

MEMS actuators and sensors: observations on their performance and selection for purpose
MEMS actuators and sensors: observations on their performance and selection for purpose
This paper presents an exercise in comparing the performance of microelectromechanical systems (MEMS) actuators and sensors as a function of operating principle. Data have been obtained from the literature for the mechanical performance characteristics of actuators, force sensors and displacement sensors. On-chip and off-chip actuators and sensors are each sub-grouped into families, classes and members according to their principle of operation. The performance of MEMS sharing common operating principles is compared with each other and with equivalent macroscopic devices. The data are used to construct performance maps showing the capability of existing actuators and sensors in terms of maximum force and displacement capability, resolution and frequency. These can also be used as a preliminary design tool, as shown in a case study on the design of an on-chip tensile test machine for materials in thin-film form.
0960-1317
S153-S164
Bell, D.J.
c6c82b92-e9bb-446a-a70d-7b9e84c12ea6
Lu, T.J.
5a4bb9e5-aa83-40aa-a79e-91a1d3cd22f9
Fleck, N.A.
0f3592b8-1ecf-4d56-b4cb-d8749bc253b0
Spearing, S.M.
9e56a7b3-e0e8-47b1-a6b4-db676ed3c17a
Bell, D.J.
c6c82b92-e9bb-446a-a70d-7b9e84c12ea6
Lu, T.J.
5a4bb9e5-aa83-40aa-a79e-91a1d3cd22f9
Fleck, N.A.
0f3592b8-1ecf-4d56-b4cb-d8749bc253b0
Spearing, S.M.
9e56a7b3-e0e8-47b1-a6b4-db676ed3c17a

Bell, D.J., Lu, T.J., Fleck, N.A. and Spearing, S.M. (2005) MEMS actuators and sensors: observations on their performance and selection for purpose. Journal of Micromechanics and Microengineering, 15, S153-S164. (doi:10.1088/0960-1317/15/7/022).

Record type: Article

Abstract

This paper presents an exercise in comparing the performance of microelectromechanical systems (MEMS) actuators and sensors as a function of operating principle. Data have been obtained from the literature for the mechanical performance characteristics of actuators, force sensors and displacement sensors. On-chip and off-chip actuators and sensors are each sub-grouped into families, classes and members according to their principle of operation. The performance of MEMS sharing common operating principles is compared with each other and with equivalent macroscopic devices. The data are used to construct performance maps showing the capability of existing actuators and sensors in terms of maximum force and displacement capability, resolution and frequency. These can also be used as a preliminary design tool, as shown in a case study on the design of an on-chip tensile test machine for materials in thin-film form.

Full text not available from this repository.

More information

Published date: 2005

Identifiers

Local EPrints ID: 23453
URI: https://eprints.soton.ac.uk/id/eprint/23453
ISSN: 0960-1317
PURE UUID: e382bd1c-180e-4409-ae12-78c6c04a3c52

Catalogue record

Date deposited: 17 Mar 2006
Last modified: 17 Jul 2017 16:17

Export record

Altmetrics

Contributors

Author: D.J. Bell
Author: T.J. Lu
Author: N.A. Fleck
Author: S.M. Spearing

University divisions

Download statistics

Downloads from ePrints over the past year. Other digital versions may also be available to download e.g. from the publisher's website.

View more statistics

Atom RSS 1.0 RSS 2.0

Contact ePrints Soton: eprints@soton.ac.uk

ePrints Soton supports OAI 2.0 with a base URL of https://eprints.soton.ac.uk/cgi/oai2

This repository has been built using EPrints software, developed at the University of Southampton, but available to everyone to use.

We use cookies to ensure that we give you the best experience on our website. If you continue without changing your settings, we will assume that you are happy to receive cookies on the University of Southampton website.

×