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MEMS resonator tuning using focused ion beam platinum deposition

Enderling, S., Jiang, L., Ross, A.W.S., Bond, S., Hedley, J., Harris, A.J., Burdess, J.S., Cheung, R., Zorman, C.A., Mehregany, M. and Walton, A.J. (2004) MEMS resonator tuning using focused ion beam platinum deposition At NSTI Nanotechnology Conference and Trade Show (Nanotech 2004). 07 - 11 Mar 2004. , p. 421.

Record type: Conference or Workshop Item (Paper)


This paper presents a novel post-fabrication tuning method which changes the resonant frequency of micromechanical beam resonators using Focused Ion Beam (FIB) deposition and removal of platinum. Tuning was achieved by depositing platinum on a 13x5m surface area at the tips of cantilever and the middle sections of bridge resonators in thicknesses ranging from 0.3 to 3.1m. Measurements on both types of resonator structures showed a maximum frequency change of -12% for 2.4 and 3.1m thick deposition. A decrease was observed in the quality (Q) factor due to the damping effect of the platinum material and the increased surface roughness of the resonator. After deposition, the change in resonant frequency was re-adjusted by precise milling of the deposited platinum

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Published date: 2004
Venue - Dates: NSTI Nanotechnology Conference and Trade Show (Nanotech 2004), 2004-03-07 - 2004-03-11


Local EPrints ID: 23540
PURE UUID: c82b9545-e77c-40c2-8196-cb809f9f6dd7
ORCID for L. Jiang: ORCID iD

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Date deposited: 09 Mar 2007
Last modified: 17 Jul 2017 16:17

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Author: S. Enderling
Author: L. Jiang ORCID iD
Author: A.W.S. Ross
Author: S. Bond
Author: J. Hedley
Author: A.J. Harris
Author: J.S. Burdess
Author: R. Cheung
Author: C.A. Zorman
Author: M. Mehregany
Author: A.J. Walton

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